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Year of Publication 08.05.2023
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APPARATUS AND METHODS FOR GAS PHASE PARTICLE REDUCTION
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Year of Publication 03.03.2022
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Methods for gapfill in substrates
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Year of Publication 24.08.2021
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Year of Publication 24.08.2021
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GRADIENT OXIDATION AND ETCH FOR PVD METAL AS BOTTOM LINER IN BOTTOM UP GAP FILL
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Year of Publication 02.11.2023
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Year of Publication 02.11.2023
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GRADIENT OXIDATION AND ETCH FOR PVD METAL AS BOTTOM LINER IN BOTTOM UP GAP FILL
HSU, Chih-Hsun, ZHANG, Aixi, WANG, Chun-Chieh, LU, Jiang, YANG, Yixiong, YUE, Shiyu, WANG, Rongjun, LEI, Yu, XIONG, Ziye, WU, Liqi, CHEN, Shihchung, LEI, Wei, WU, Meng-Shan, XU, Yi, YANG, Tsung-Han, LAKSHMANAN, Annamalai, ZHANG, Jie, TANG, Xianmin, QI, Zhimin
Year of Publication 26.10.2023
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Year of Publication 26.10.2023
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METHODS FOR GAPFILL IN SUBSTRATES
WRENCH, Jacqueline Samantha, YANG, Yixiong, LIN, Yongjing, CHEN, Shihchung, LO, Yuan-hui, LIU, Wei, CHEN, Wen Ting, GANDIKOTA, Srinivas
Year of Publication 16.09.2021
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Year of Publication 16.09.2021
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METHODS FOR GAPFILL IN SUBSTRATES
CHEN, ShihChung, WRENCH, Jacqueline Samantha, YANG, Yixiong, LIN, Yongjing, LO, Yuan-hui, LIU, Wei, CHEN, Wen Ting, GANDIKOTA, Srinivas
Year of Publication 16.09.2021
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Year of Publication 16.09.2021
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