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Directional solidification furnace for reducing melt contamination and reducing wafer contamination

Directional solidification furnace for reducing melt contamination and reducing wafer contamination

by FERRY, LEE, KIMBEL, STEVEN L, SCHRENKER, RICHARD G, CHEN, JIHONG (JOHN)
Year of Publication 21.05.2015

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Patent

Directional solidification furnace for reducing melt contamination and reducing wafer contamination

Directional solidification furnace for reducing melt contamination and reducing wafer contamination

by SCHRENKER RICHARD G, CHEN JIHONG JOHN, FERRY LEE W, KIMBEL STEVEN L
Year of Publication 31.07.2013

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Patent

Directional solidification furnace for reducing melt contamination and reducing wafer contamination

Directional solidification furnace for reducing melt contamination and reducing wafer contamination

by SCHRENKER RICHARD G, CHEN JIHONG JOHN, FERRY LEE W, KIMBEL STEVEN L
Year of Publication 17.08.2011

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Patent