LARGE VIA BUFFER
CHEN, HSUEHUNG, WANG, JUNLI, LIU, CHIUN, MIGNOT, YANN, SILVESTRE, MARY CLAIRE
Year of Publication 17.12.2020
Get full text
Year of Publication 17.12.2020
Patent
DOUBLE METAL PATTERNING
CHEN, HSUEHUNG, Clevenger, Lawrence A, Kelly, James, MIGNOT, Yann, Xu, YONGAN
Year of Publication 15.10.2020
Get full text
Year of Publication 15.10.2020
Patent
METAL SPACER SELF ALIGNED MULTI-PATTERNING INTEGRATION
CHEN, HSUEHUNG, Clevenger, Lawrence A, Kelly, James J, MIGNOT, Yann, Peethala, Cornelius Brown
Year of Publication 16.04.2020
Get full text
Year of Publication 16.04.2020
Patent