Resist compound and method of forming pattern using the same
KIM HYUNWOO, LEE YOUNGKWAN, KIM HOYOUNG, CHEE HYUNGJUN, KIM SOOCHAN, YI SONGSE
Year of Publication 02.11.2023
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Year of Publication 02.11.2023
Patent
RESIST COMPOUND AND METHOD OF FORMING PATTERN USING THE SAME
LEE, Youngkwan, YI, SONGSE, KIM, SOOCHAN, CHEE, Hyungjun, KIM, HYUNWOO, KIM, HOYOUNG
Year of Publication 26.10.2023
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Year of Publication 26.10.2023
Patent