Extracting ion stream from high vacuum chamber into low vacuum chamber esp. for analysis of surface of solid
HORINO, YUJI, IKEDA, OSAKA, JP, MOKUNO, YOSHIAKI, IKEDA, OSAKA, JP, KINOMURA, ATSUSHI, IKEDA, OSAKA, JP, FUJII, KANENAGA, HYOGO, JP, CHAYAHARA, AKIYOSHI, IKEDA, OSAKA, JP
Year of Publication 18.07.1996
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Year of Publication 18.07.1996
Patent