Determining the shape and periodicity of nanostructures using small-angle X-ray scattering
Sunday, Daniel F., List, Scott, Chawla, Jasmeet S., Kline, R. Joseph
Published in Journal of applied crystallography (01.10.2015)
Published in Journal of applied crystallography (01.10.2015)
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Journal Article
마이크로 전자 도전성 경로들 및 이를 제조하는 방법
HOURANI RAMI, KOBRINSKY MAURO J, ROBERTS JEANETTE M, CLENDENNING SCOTT B, CHAWLA JASMEET S, GSTREIN FLORIAN
Year of Publication 08.01.2018
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Year of Publication 08.01.2018
Patent
METHODS FOR FORMING INTERCONNECT LAYERS HAVING TIGHT PITCH INTERCONNECT STRUCTURES
SCHENKER RICHARD E, TAN ELIOT N, MYERS ALAN M, SINGH KANWAL JIT, CHAWLA JASMEET S, JEZEWSKI CHRISTOPHER J
Year of Publication 23.09.2016
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Year of Publication 23.09.2016
Patent
Demonstration of new planar capacitor (PCAP) vehicles to evaluate dielectrics and metal barrier thin films
Lin, Kevin L., Bielefeld, Jeffrey, Chawla, Jasmeet S., Carver, Colin T., Chebiam, Ramanan, Clarke, James S., Faber, Jacob, Harmes, Michael, Indukuri, Tejaswi, Jezewski, Christopher, Kasim, Rahim, Kobrinsky, Mauro, Kabir, Nafees A., Krist, Brian, Lakamraju, Narendra, Lang, Hazel, Mays, Ebony, Myers, Alan M., Plombon, John J., Singh, Kanwal Jit, Torres, Jessica, Yoo, Hui Jae
Published in 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) (01.05.2015)
Published in 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) (01.05.2015)
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Conference Proceeding
Structural characterization of a Cu/MgO(001) interface using CS-corrected HRTEM
CAZOTTES, S, ZHANG, Z. L, DANIEL, R, CHAWLA, J. S, GALL, D, DEHM, G
Published in Thin solid films (01.12.2010)
Published in Thin solid films (01.12.2010)
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Conference Proceeding
Journal Article
METHOD OF MAKING INSULATING SIDEWALL LINERS IN TRENCHES
CLENDENNING, Scott B, GSTREIN, Florian, KOBRINSKY, Mauro J, CHAWLA, Jasmeet S, ROBERTS, Jeanette M, HOURANI, Rami
Year of Publication 27.10.2021
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Year of Publication 27.10.2021
Patent
Compliant layer for wafer to wafer bonding
McDonnell, Myra, Kobrinsky, Mauro J, Chawla, Jasmeet S, Meister, Stefan, Pawashe, Chytra, Pantuso, Daniel
Year of Publication 07.07.2020
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Year of Publication 07.07.2020
Patent
Maskless air gap to prevent via punch through
Younkin, Todd R, Han, Eungnak, Chandhok, Manish, Krysak, Marie, Tronic, Tristan A, Chawla, Jasmeet S, Yoo, Hui Jae
Year of Publication 06.04.2021
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Year of Publication 06.04.2021
Patent