Epitaxy metrology in fin field effect transistors
Kris, Roman, Levin, Sahar, Frishman, Einat, Chaudhary, Jitendra Pradipkumar, Alkoken, Ran, Chang, Chih-Chieh
Year of Publication 27.09.2022
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Year of Publication 27.09.2022
Patent
EPITAXY METROLOGY IN FIN FIELD EFFECT TRANSISTORS
FRISHMAN, Einat, CHAUDHARY, Jitendra Pradipkumar, KRIS, Roman, LEVIN, Sahar, ALKOKEN, Ran, CHANG, Chih-Chieh
Year of Publication 18.08.2022
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Year of Publication 18.08.2022
Patent