Seal for an assembly in a vapor deposition chamber
Lin, Scott, Chaudhari, Saurabh M, Salimian, Siamak, Ruhland, Eric, Chan, Boon Sen, Wu, Dien-Yeh, Gondhalekar, Sudhir R, Yang, Yao-Hung, Nagle, Philip Wayne, Pal, Aniruddha
Year of Publication 14.05.2024
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Year of Publication 14.05.2024
Patent
SEAL IN A VAPOR DEPOSITION CHAMBER
NAGLE, PHILIP WAYNE, SALIMIAN, SIAMAK, CHAN, BOON SEN, RUHLAND, ERIC, PAL, ANIRUDDHA, GONDHALEKAR, SUDHIR R, CHAUDHARI, SAURABH M, WU, DIEN-YEH, YANG, YAO-HUNG, LIN, SCOTT
Year of Publication 21.06.2022
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Year of Publication 21.06.2022
Patent