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Published in 2021 37th Semiconductor Thermal Measurement, Modeling & Management Symposium (SEMI-THERM) (22.03.2021)
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Journal Article
LOWER ELECTRODE ASSEMBLY OF PLASMA PROCESSING CHAMBER
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Year of Publication 06.03.2019
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Year of Publication 09.08.2016
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LOWER ELECTRODE ASSEMBLY OF PLASMA PROCESSING CHAMBER
CHAU, QUAN, SINGH, HARMEET, RICHARDSON, BRETT C, GAFF, KEITH WILLIAM, AUGUSTINO, JASON, HA, HANH TUONG
Year of Publication 28.10.2015
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Year of Publication 28.10.2015
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LOWER ELECTRODE ASSEMBLY OF PLASMA PROCESSING CHAMBER
CHAU, QUAN, SINGH, HARMEET, RICHARDSON, BRETT C, GAFF, KEITH WILLIAM, AUGUSTINO, JASON, HA, HANH TUONG
Year of Publication 13.07.2011
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Year of Publication 13.07.2011
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LOWER ELECTRODE ASSEMBLY OF PLASMA PROCESSING CHAMBER
CHAU, QUAN, SINGH, HARMEET, RICHARDSON, BRETT C, GAFF, KEITH WILLIAM, AUGUSTINO, JASON, HA, HANH TUONG
Year of Publication 12.08.2010
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Year of Publication 12.08.2010
Patent
LOWER ELECTRODE ASSEMBLY OF PLASMA PROCESSING CHAMBER
CHAU, QUAN, SINGH, HARMEET, RICHARDSON, BRETT C, GAFF, KEITH WILLIAM, AUGUSTINO, JASON, HA, HANH TUONG
Year of Publication 03.06.2010
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Year of Publication 03.06.2010
Patent
LOWER ELECTRODE ASSEMBLY OF PLASMA PROCESSING CHAMBER
HA HANH TUONG, RICHARDSON BRETT C, AUGUSTINO JASON, CHAU QUAN, SINGH HARMEET, GAFF KEITH WILLIAM
Year of Publication 06.05.2010
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Year of Publication 06.05.2010
Patent
Lower electrode assembly of plasma processing chamber
CHAU, QUAN, SINGH, HARMEET, RICHARDSON, BRETT C, GAFF, KEITH WILLIAM, AUGUSTINO, JASON, HA, HANH TUONG
Year of Publication 11.08.2015
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Year of Publication 11.08.2015
Patent
Lower electrode assembly of plasma processing chamber
HA HANH TUONG, RICHARDSON BRETT C, AUGUSTINO JASON, CHAU QUAN, SINGH HARMEET, GAFF KEITH WILLIAM
Year of Publication 06.08.2014
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Year of Publication 06.08.2014
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Lower electrode assembly of plasma processing chamber
HA HANH TUONG, RICHARDSON BRETT C, AUGUSTINO JASON, CHAU QUAN, SINGH HARMEET, GAFF KEITH WILLIAM
Year of Publication 14.09.2011
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Year of Publication 14.09.2011
Patent
Lower electrode assembly of plasma processing chamber
CHAU, QUAN, SINGH, HARMEET, RICHARDSON, BRETT C, GAFF, KEITH WILLIAM, AUGUSTINO, JASON, HA, HANH TUONG
Year of Publication 16.08.2010
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Year of Publication 16.08.2010
Patent