Multi-mode thin film deposition apparatus and method of depositing a thin film
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Year of Publication 03.06.2015
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Vertical gate all around (vgaa) devices and methods of manufacturing the same
CHANG, CHIAHAO, WANG, CHINCHI, CHEN, CHENGLONG, LIU, CHIWEN, SHIEH, MINGSHAN, LIEN, WAIYI, WANG, CHIHHAO
Year of Publication 11.08.2017
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Year of Publication 11.08.2017
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