FIN ISOLATION STRUCTURES FORMED AFTER GATE METALLIZATION
Joachim, Robert, Ghani, Tahir, Chang, Tsuan-Chung, Pursel, Sean, Guler, Leonard P
Year of Publication 07.09.2023
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Year of Publication 07.09.2023
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ANGLED GATE OR DIFFUSION PLUGS
Ghani, Tahir, Chang, Tsuan-Chung, Guler, Leonard P, Sun, Peter P, Wallace, Charles H, Goornavar, Virupaxi
Year of Publication 07.09.2023
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Year of Publication 07.09.2023
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GATE ALIGNED FIN CUT FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABRICATION
HASAN, Mohammad, WALLACE, Charles H, PURSEL, Sean, CHANG, Tsuan-Chung, GUHA, Biswajeet, HSU, William, GULER, Leonard P, GHANI, Tahir
Year of Publication 08.12.2022
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Year of Publication 08.12.2022
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SPACER SELF-ALIGNED VIA STRUCTURES FOR GATE CONTACT OR TRENCH CONTACT
HASAN, Mohammad, WALLACE, Charles H, JOACHIM, Robert, CHANG, Tsuan-Chung, LIU, Shengsi, GULER, Leonard P, GHANI, Tahir
Year of Publication 08.12.2022
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Year of Publication 08.12.2022
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SPACER SELF-ALIGNED VIA STRUCTURES FOR GATE CONTACT OR TRENCH CONTACT
HASAN, Mohammad, WALLACE, Charles H, JOACHIM, Robert, CHANG, Tsuan-Chung, LIU, Shengsi, GULER, Leonard P, GHANI, Tahir
Year of Publication 07.12.2022
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Year of Publication 07.12.2022
Patent
GATE ALIGNED FIN CUT FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABRICATION
HASAN, Mohammad, WALLACE, Charles H, PURSEL, Sean, CHANG, Tsuan-Chung, GUHA, Biswajeet, HSU, William, GULER, Leonard P, GHANI, Tahir
Year of Publication 07.12.2022
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Year of Publication 07.12.2022
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EXTREME ULTRAVIOLET LITHOGRAPHY PATTERNING WITH ASSIST FEATURES
Guler, Leonard, Teweldebrhan, Desalegne, Joachim, Robert, Ghani, Tahir, Chang, Tsuan-Chung, Wallace, Charles, Farias, Dario, Tsai, Chia-Ho, Liu, Shengsi, Abdallah, Hossam, Singh, Chetana
Year of Publication 29.12.2022
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Year of Publication 29.12.2022
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METAL LINE PROFILE SHAPING FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABRICATION
HASAN, Mohammad, CHANG, Tsuan-Chung, JOACHIM, Robert, WALLACE, Charles H, TEWELDEBRHAN, Desalegne B, GULER, Leonard P, MAKOWSKI, Michael James, KRIEGEL, Benjamin, GHANI, Tahir
Year of Publication 29.12.2022
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Year of Publication 29.12.2022
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METAL LINE PROFILE SHAPING FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABRICATION
HASAN, Mohammad, CHANG, Tsuan-Chung, JOACHIM, Robert, WALLACE, Charles H, TEWELDEBRHAN, Desalegne B, GULER, Leonard P, MAKOWSKI, Michael, KRIEGEL, Benjamin, GHANI, Tahir
Year of Publication 28.12.2022
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Year of Publication 28.12.2022
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EXTREME ULTRAVIOLET LITHOGRAPHY PATTERNING WITH ASSIST FEATURES
SINGH, Chetana, CHANG, Tsuan-Chung, JOACHIM, Robert, TSAI, Chia-Ho, GULER, Leonard, LIU, Shengsi, FARIAS, Dario, WALLACE, Charles, GHANI, Tahir, ABDALLAH, Hossam, TEWELDEBRHAN, Desalegne
Year of Publication 28.12.2022
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Year of Publication 28.12.2022
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