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Year of Publication 03.08.2023
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Year of Publication 01.11.2018
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Year of Publication 19.07.2017
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Year of Publication 19.07.2017
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Year of Publication 17.01.2019
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EPI BASE RING
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Year of Publication 25.11.2015
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Year of Publication 25.11.2015
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Year of Publication 19.05.2017
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Year of Publication 19.05.2017
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Year of Publication 24.01.2017
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Year of Publication 24.01.2017
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Year of Publication 24.07.2017
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Year of Publication 24.07.2017
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Year of Publication 15.02.2016
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Year of Publication 15.02.2016
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UPPER DOME WITH INJECTION ASSEMBLY
YE ZHIYUAN, CARLSON DAVID K, LO KIN PONG, BRILLHART PAUL, CHANG ANZHONG, TONG EDRIC, MACK JAMES FRANCIS, SANCHEZ ERROL ANTONIO C, SHAH KARTIK, KUPPURAO SATHEESH, RANISH JOSEPH M
Year of Publication 19.10.2016
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Year of Publication 19.10.2016
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YE ZHIYUAN, HUANG YI CHIAU, CONG ZHEPENG, BAUTISTA KEVIN JOSEPH, LO KIN PONG, BRILLHART PAUL, CHANG ANZHONG, NGO ANHTHU, TONG EDRIC, MACK JAMES FRANCIS, SHAH KARTIK, CHU SCHUBERT S, ZHU ZUOMING, MYO NYI O, RAMACHANDRAN BALASUBRAMANIAN, LI XUEBIN
Year of Publication 02.02.2017
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Year of Publication 02.02.2017
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HOLLOW CATHODE SHOWERHEAD
TAM ALEXANDER, QUACH DAVID, ISHIKAWA TETSUYA, CHANG ANZHONG, KRYLIOUK OLGA, BURROWS BRIAN, POON TZE
Year of Publication 24.05.2012
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Year of Publication 24.05.2012
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QUARTZ UPPER AND LOWER DOMES
ABOAGYE STEVE, SAMIR MEHMET TUGRUL, CARLSON DAVID K, NGUYEN ANH N, SEREBRYANOV OLEG, CHANG ANZHONG, BRILLHART PAUL, LAU SHU KWAN, RANISH JOSEPH M, PATALAY KAILASH KIRAN, ZHU ZUOMING, IU DONGMING, KUMAR SURAJIT, KUPPURAO SATHEESH, DINIZ HERMAN
Year of Publication 25.09.2015
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Year of Publication 25.09.2015
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METHOD AND APPARATUS FOR INDUCING TURBULENT FLOW OF A PROCESSING CHAMBER CLEANING GAS
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Year of Publication 13.12.2013
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Year of Publication 13.12.2013
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Year of Publication 18.01.2012
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Year of Publication 18.01.2012
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HVPE CHAMBER HARDWARE
NGUYEN SON T, QUACH DAVID H, MELNIK YURIY, ISHIKAWA TETSUYA, CHANG ANZHONG, PANG LILY, RATIA HARSUKHDEEP S, KRYLIOUK OLGA
Year of Publication 10.01.2012
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Year of Publication 10.01.2012
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