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Year of Publication 01.05.2008
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Year of Publication 01.05.2008
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METHOD AND APPARATUS FOR PHOTOMASK ETCHING
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Year of Publication 01.05.2008
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Process for etching a transparent workpiece including backside endpoint detection steps
BIVENS DARIN, KUMAR AJAY, GRIMBERGEN MICHAEL N, LEWINGTON RICHARD, NGUYEN KHIEM K, CHANDRACHOOD MADHAVI R
Year of Publication 01.05.2008
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Year of Publication 01.05.2008
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Method of processing a workpiece in a plasma reactor with dynamic adjustment of the plasma source power applicator and the workpiece relative to one another
Chandrachood, Madhavi R, Lewington, Richard, Bivens, Darin, Kumar, Ajay, Ibrahim, Ibrahim M, Grimbergen, Michael N, Koch, Renee, Panayil, Sheeba J
Year of Publication 21.04.2009
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Year of Publication 21.04.2009
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Method of processing a workpiece in a plasma reactor with dynamic adjustment of the plasma source power applicator and the workpiece relative to one another
BIVENS DARIN, PANAYIL SHEEBA J, IBRAHIM IBRAHIM M, KUMAR AJAY, GRIMBERGEN MICHAEL N, LEWINGTON RICHARD, KOCH RENEE, CHANDRACHOOD MADHAVI R
Year of Publication 21.04.2009
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Year of Publication 21.04.2009
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Method of processing a workpiece in a plasma reactor employing a dynamically adjustable plasma source power applicator
BIVENS DARIN, PANAYIL SHEEBA J, IBRAHIM IBRAHIM M, KUMAR AJAY, GRIMBERGEN MICHAEL N, LEWINGTON RICHARD, KOCH RENEE, CHANDRACHOOD MADHAVI R
Year of Publication 17.03.2009
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Year of Publication 17.03.2009
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Method of processing a workpiece in a plasma reactor employing a dynamically adjustable plasma source power applicator
Chandrachood, Madhavi R, Lewington, Richard, Bivens, Darin, Kumar, Ajay, Ibrahim, Ibrahim M, Grimbergen, Michael N, Koch, Renee, Panayil, Sheeba J
Year of Publication 17.03.2009
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Year of Publication 17.03.2009
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PLASMA REACTOR WITH A DYNAMICALLY ADJUSTABLE PLASMA SOURCE POWER APPLICATOR
BIVENS DARIN, PANAYIL SHEEBA J, IBRAHIM IBRAHIM M, KUMAR AJAY, GRIMBERGEN MICHAEL N, LEWINGTON RICHARD, KOCH RENEE, CHANDRACHOOD MADHAVI R
Year of Publication 03.02.2009
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Year of Publication 03.02.2009
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PLASMA REACTOR WITH A DYNAMICALLY ADJUSTABLE PLASMA SOURCE POWER APPLICATOR
BIVENS DARIN, PANAYIL SHEEBA J, IBRAHIM IBRAHIM M, KUMAR AJAY, GRIMBERGEN MICHAEL N, LEWINGTON RICHARD, KOCH RENEE, CHANDRACHOOD MADHAVI R
Year of Publication 29.12.2008
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Year of Publication 29.12.2008
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Workpiece rotation apparatus for a plasma reactor system
KUMAR, AJAY, LEWINGTON, RICHARD, IBRAHIM, IBRAHIM M, ANDERSON, SCOTT ALAN, NGUYEN, KHIEM K, CHANDRACHOOD, MADHAVI R
Year of Publication 01.06.2014
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Year of Publication 01.06.2014
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Plasma reactor with a dynamically adjustable plasma source power applicator
BIVENS DARIN, PANAYIL SHEEBA J, IBRAHIM IBRAHIM M, KUMAR AJAY, GRIMBERGEN MICHAEL N, LEWINGTON RICHARD, KOCH RENEE, CHANDRACHOOD MADHAVI R
Year of Publication 07.10.2008
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Year of Publication 07.10.2008
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Plasma reactor with apparatus for dynamically adjusting the plasma source power applicator and the workpiece relative to one another
BIVENS DARIN, PANAYIL SHEEBA J, IBRAHIM IBRAHIM M, KUMAR AJAY, GRIMBERGEN MICHAEL N, LEWINGTON RICHARD, KOCH RENEE, CHANDRACHOOD MADHAVI R
Year of Publication 02.09.2008
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Year of Publication 02.09.2008
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Plasma reactor with apparatus for dynamically adjusting the plasma source power applicator and the workpiece relative to one another
Chandrachood, Madhavi R, Lewington, Richard, Bivens, Darin, Kumar, Ajay, Ibrahim, Ibrahim M, Grimbergen, Michael N, Koch, Renee, Panayil, Sheeba J
Year of Publication 02.09.2008
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Year of Publication 02.09.2008
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PLASMA ETCHING METHOD AND EQUIPMENT OF PHOTOMASK
OUYE ALAN HIROSHI, BIVENS DARIN, PANAYIL SHEEBA J, SABHARWAL AMITABH, KUMAR AJAY, LEWINGTON RICHARD, CHANDRACHOOD MADHAVI R
Year of Publication 15.05.2008
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Year of Publication 15.05.2008
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