마스크 재료들의 플라즈마 에칭
YALAMANCHILI MADHAVA RAO, LEUNG TOI YUE BECKY, CHANDRACHOOD MADHAVI RAJARAM
Year of Publication 15.12.2023
Get full text
Year of Publication 15.12.2023
Patent
METHOD AND APPARATUS FOR PHOTOMASK PLASMA ETCHING
CHANDRACHOOD MADHAVI, YAU WAI FAN, SATITPUNWAYCHA PETER, KUMAR AJAY, ANDERSON SCOTT A
Year of Publication 12.11.2015
Get full text
Year of Publication 12.11.2015
Patent
PLASMA REACTOR WITH A DYNAMICALLY ADJUSTABLE PLASMA SOURCE POWER APPLICATOR
BIVENS DARIN, PANAYIL SHEEBA J, IBRAHIM IBRAHIM M, KUMAR AJAY, GRIMBERGEN MICHAEL N, LEWINGTON RICHARD, KOCH RENEE, CHANDRACHOOD MADHAVI R
Year of Publication 27.11.2014
Get full text
Year of Publication 27.11.2014
Patent
PLASMA ETCHING OF MASK MATERIALS
CHANDRACHOOD, Madhavi Rajaram, YALAMANCHILI, Madhava Rao, LEUNG, Toi Yue Becky
Year of Publication 06.03.2024
Get full text
Year of Publication 06.03.2024
Patent
Plasma etching of mask materials
Chandrachood, Madhavi Rajaram, Yalamanchili, Madhava Rao, Leung, Toi Yue Becky
Year of Publication 27.02.2024
Get full text
Year of Publication 27.02.2024
Patent
PLASMA ETCHING OF MASK MATERIALS
Chandrachood, Madhavi Rajaram, Yalamanchili, Madhava Rao, Leung, Toi Yue Becky
Year of Publication 03.11.2022
Get full text
Year of Publication 03.11.2022
Patent
PLASMA ETCHING OF MASK MATERIALS
CHANDRACHOOD, Madhavi Rajaram, YALAMANCHILI, Madhava Rao, LEUNG, Toi Yue Becky
Year of Publication 03.11.2022
Get full text
Year of Publication 03.11.2022
Patent
METHOD AND APPARATUS FOR PHOTOMASK PLASMA ETCHING
OUYE ALAN HIROSHI, BIVENS DARIN, PANAYIL SHEEBA J, SABHARWAL AMITABH, KUMAR AJAY, LEWINGTON RICHARD, CHANDRACHOOD MADHAVI R
Year of Publication 02.04.2010
Get full text
Year of Publication 02.04.2010
Patent
原子間力顕微鏡を用いた微小スケール温度場の計測
中別府, 修, 土方, 邦夫, Madhavi, CHANDRACHOOD, Jie, LAI, Arun, MAJUMDAR
Published in 日本機械学会論文集 B編 (01.01.1996)
Published in 日本機械学会論文集 B編 (01.01.1996)
Get full text
Journal Article
PLASMA ETCHING OF MASK MATERIALS
YALAMANCHILI, MADHAVA RAO, LEUNG, TOI YUE BECKY, CHANDRACHOOD, MADHAVI RAJARAM
Year of Publication 21.05.2023
Get full text
Year of Publication 21.05.2023
Patent
PLANARIZED COPPER CLEANING FOR REDUCING DEFECTS
LI SHIJIAN, CHANDRACHOOD MADHAVI, EMAMI RAMIN, SEN-HOU KOO, REDEKER FRED C
Year of Publication 25.06.2001
Get full text
Year of Publication 25.06.2001
Patent
Plasma etching of mask materials
YALAMANCHILI, MADHAVA RAO, LEUNG, TOI YUE BECKY, CHANDRACHOOD, MADHAVI RAJARAM
Year of Publication 01.12.2022
Get full text
Year of Publication 01.12.2022
Patent