Method of forming metal liner for interconnect structure
TANG XIANMIN, QU GE, KASHEFI, KEVIN, WU ZHIYUAN, CHEN FENG, CERVANTES CARMEN LYLE, KIM YONG-JIN
Year of Publication 12.04.2024
Get full text
Year of Publication 12.04.2024
Patent
Method and device for pre-cleaning and processing wafer surface
TANG XIANMIN, HA TAE-HONG, CHEN LU, TSAI CHENG-HSIUNG MATTHEW, CHEN FENG, XU WENJING, JANSEN ALEXANDER, CERVANTES CARMEN LYLE, KAMATH ARAVIND, XIE XIANGJIN
Year of Publication 19.08.2022
Get full text
Year of Publication 19.08.2022
Patent