Iodine-containing acid cleavable compounds, polymers derived therefrom, and photoresist compositions
AQAD EMAD, PARK JONG KEUN, CUI LI, POPERE BHOOSHAN C, YINJIE CEN, LEE CHUNG-BONG
Year of Publication 04.04.2023
Get full text
Year of Publication 04.04.2023
Patent
COMPOUND AND PHOTORESIST COMPOSITION COMPRISING SAME
AQAD EMAD, PARK JONG KEUN, CUI LI, CEN YINJIE, HOELZEL, CHRISTOPHER, A, COLEY SUZANNE M, LEE CHOONG-BONG, CAMERON JAMES F
Year of Publication 21.11.2023
Get full text
Year of Publication 21.11.2023
Patent