TWO STEP REACTIVE MAGNETRON SPUTTERING OF BLT THIN FILMS
BESLAND, M. P., BORDERON, C., CAVELLIER, M., LE TACON, S., RICHARD-PLOUET, M., ALBERTINI, D., AVERTY, D., TESSIER, P. Y., GUNDEL, H. W., BROHAN, L., DJOUADI, M. A.
Published in Integrated ferroelectrics (01.01.2007)
Published in Integrated ferroelectrics (01.01.2007)
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