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Year of Publication 11.05.2023
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A PROJECTION OBJECTIVE INCLUDING AN OPTICAL DEVICE
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Year of Publication 03.02.2022
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Projektionsbelichtungsanlage umfassend ein Projektionsobjektiv, aufweisend eine optische Einrichtung, optisches Element, Vorrichtung zur Korrektur von Abbildungsfehlern, Verfahren zur Beeinflussung der Oberflächenform eines optischen Elements
Pollak, Thilo, Stiepan, Hans-Michael, Lippert, Johannes, Gruner, Toralf, Hild, Kerstin, Cavaco, Jeffrey
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Year of Publication 02.06.2022
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A projection objective including an optical device
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Year of Publication 16.03.2022
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Year of Publication 16.03.2022
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