Infrared Cavity Ringdown Spectroscopy of Jet-Cooled Nucleotide Base Clusters and Water Complexes
Casaes, Raphael N, Paul, Joshua B, McLaughlin, R. Patrick, Saykally, Richard J, van Mourik, Tanja
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (16.12.2004)
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (16.12.2004)
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Journal Article
Infrared Cavity Ringdown Spectroscopy of Jet-Cooled Polycyclic Aromatic Hydrocarbons
Huneycutt, Alex J., Casaes, Raphael N., McCall, Benjamin J., Chung, Chao-Yu, Lee, Yuan-Pern, Saykally, Richard J.
Published in Chemphyschem (19.03.2004)
Published in Chemphyschem (19.03.2004)
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Journal Article
Hydrogen Bonding in Alcohol Clusters: A Comparative Study by Infrared Cavity Ringdown Laser Absorption Spectroscopy
Provencal, Robert A, Casaes, Raphael N, Roth, Katja, Paul, Joshua B, Chapo, Chris N, Saykally, Richard J, Tschumper, Gregory S, Schaefer, Henry F
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (24.02.2000)
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (24.02.2000)
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Journal Article
MOVEABLE EDGE COUPLING RING FOR EDGE PROCESS CONTROL DURING SEMICONDUCTOR WAFER PROCESSING
YAN HAOQUAN, CASAES RAPHAEL, MCCHESNEY JON, PATERSON ALEX, O'NEILL ROBERT GRIFFITH
Year of Publication 17.10.2023
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Year of Publication 17.10.2023
Patent
이온 빔 에칭 시스템 및 방법
HUANG SHUOGANG, LIN CHIH MIN, MISHRA ANURAG KUMAR, CHANG CHIH YANG, YUN SEOKMIN, CASAES RAPHAEL, CHENG SHIH YUAN
Year of Publication 09.04.2024
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Year of Publication 09.04.2024
Patent
REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES
HAN ZHUMIN, WU JOANNA, CONTRERAS ANTHONY, LEUNG KEVIN, CASAES RAPHAEL, SANCHEZ ALEJANDRO, FORD GRAYSON, EHRLICH DARRELL, ALWAN ARAVIND
Year of Publication 13.07.2023
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Year of Publication 13.07.2023
Patent
MOVEABLE EDGE COUPLING RING FOR EDGE PROCESS CONTROL DURING SEMICONDUCTOR WAFER PROCESSING
YAN HAOQUAN, CASAES RAPHAEL, MCCHESNEY JON, PATERSON ALEX, O'NEILL ROBERT GRIFFITH
Year of Publication 30.06.2021
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Year of Publication 30.06.2021
Patent
REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES
HAN ZHUMIN, WU JOANNA, CONTRERAS ANTHONY, LEUNG KEVIN, CASAES RAPHAEL, SANCHEZ ALEJANDRO, FORD GRAYSON, EHRLICH DARRELL, ALWAN ARAVIND
Year of Publication 13.09.2021
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Year of Publication 13.09.2021
Patent
에지 링 포지셔닝 및 센터링 피처들을 포함하는 플라즈마 시스 튜닝을 위한 교체가능한 에지 링 어셈블리 및/또는 접을 수 있는 에지 링 어셈블리
HAN ZHUMIN, WU JOANNA, CONTRERAS ANTHONY, LEUNG KEVIN, CASAES RAPHAEL, SANCHEZ ALEJANDRO, FORD GRAYSON, EHRLICH DARRELL, ALWAN ARAVIND
Year of Publication 10.06.2020
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Year of Publication 10.06.2020
Patent
MOVEABLE EDGE COUPLING RING FOR EDGE PROCESS CONTROL DURING SEMICONDUCTOR WAFER PROCESSING
YAN HAOQUAN, CASAES RAPHAEL, MCCHESNEY JON, PATERSON ALEX, O'NEILL ROBERT GRIFFITH
Year of Publication 10.10.2018
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Year of Publication 10.10.2018
Patent
MOVEABLE EDGE COUPLING RING FOR EDGE PROCESS CONTROL DURING SEMICONDUCTOR WAFER PROCESSING
YAN HAOQUAN, CASAES RAPHAEL, MCCHESNEY JON, PATERSON ALEX, O'NEILL ROBERT GRIFFITH
Year of Publication 26.07.2016
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Year of Publication 26.07.2016
Patent
COMPONENTS OF PLASMA PROCESSING CHAMBERS HAVING TEXTURED PLASMA RESISTANT COATINGS
FANG YAN, STEVENSON TOM, CASAES RAPHAEL, KIM, TAE WON, SHIH HONG, O'NEILL ROBERT G
Year of Publication 02.05.2013
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Year of Publication 02.05.2013
Patent
METHOD AND APPARATUS OF HALOGEN REMOVAL
CHOU SHANG I, RAMACHANDRAN SEETHARAMAN, CASAES RAPHAEL, SANT SANKET, SINGH HARMEET, VAHEDI VAHID
Year of Publication 21.08.2012
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Year of Publication 21.08.2012
Patent
Edge ring arrangement with moveable edge rings
Casaes, Raphael, Yan, Haoquan, O'Neill, Robert Griffith, Mcchesney, Jon, Paterson, Alex
Year of Publication 02.07.2024
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Year of Publication 02.07.2024
Patent
REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES
Alwan, Aravind, Casaes, Raphael, SANCHEZ, Alejandro, Leung, Kevin, Han, Zhumin, Ford, Grayson, Contreras, Anthony, Wu, Joanna, Ehrlich, Darrell
Year of Publication 01.02.2024
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Year of Publication 01.02.2024
Patent
Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features
Alwan, Aravind, Casaes, Raphael, Leung, Kevin, Han, Zhumin, Ford, Grayson, Sanchez, Alejandro, Contreras, Anthony, Wu, Joanna, Ehrlich, Darrell
Year of Publication 24.10.2023
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Year of Publication 24.10.2023
Patent
ION BEAM ETCH SYSTEM AND METHOD
CHENG, Shih-Yuan, CASAES, Raphael, LIN, Chih-Min, MISHRA, Anurag Kumar, YUN, Seokmin, CHANG, Chih-Yang, HUANG, Shuogang
Year of Publication 02.03.2023
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Year of Publication 02.03.2023
Patent