REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES
CASAES, Raphael, SANCHEZ, Alejandro, CONTRERAS, Anthony, HAN, Zhumin, ALWAN, Aravind, WU, Joanna, EHRLICH, Darrell, FORD, Grayson, LEUNG, Kevin
Year of Publication 20.07.2022
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Year of Publication 20.07.2022
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EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS
Casaes, Raphael, Yan, Haoquan, O'Neill, Robert Griffith, McChesney, Jon, Paterson, Alex
Year of Publication 17.06.2021
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Year of Publication 17.06.2021
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REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES
CASAES, Raphael, SANCHEZ, Alejandro, CONTRERAS, Anthony, HAN, Zhumin, ALWAN, Aravind, WU, Joanna, EHRLICH, Darrell, FORD, Grayson, LEUNG, Kevin
Year of Publication 23.06.2021
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Year of Publication 23.06.2021
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Moveable edge coupling ring for edge process control during semiconductor wafer processing
Casaes, Raphael, Yan, Haoquan, O'Neill, Robert Griffith, McChesney, Jon, Paterson, Alex
Year of Publication 19.05.2020
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Year of Publication 19.05.2020
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REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES
CASAES, Raphael, SANCHEZ, Alejandro, CONTRERAS, Anthony, HAN, Zhumin, ALWAN, Aravind, WU, Joanna, EHRLICH, Darrell, FORD, Grayson, LEUNG, Kevin
Year of Publication 17.12.2020
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Year of Publication 17.12.2020
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REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES
CASAES, Raphael, SANCHEZ, Alejandro, CONTRERAS, Anthony, HAN, Zhumin, ALWAN, Aravind, WU, Joanna, EHRLICH, Darrell, FORD, Grayson, LEUNG, Kevin
Year of Publication 28.08.2020
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Year of Publication 28.08.2020
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MOVEABLE EDGE COUPLING RING FOR EDGE PROCESS CONTROL DURING SEMICONDUCTOR WAFER PROCESSING
Jon McCHESNEY, Raphael CASAES, Haoquan YAN, Robert Griffith O'NEILL, Alex PATERSON
Year of Publication 27.08.2019
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Year of Publication 27.08.2019
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REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES
CASAES, Raphael, SANCHEZ, Alejandro, CONTRERAS, Anthony, HAN, Zhumin, ALWAN, Aravind, WU, Joanna, EHRLICH, Darrell, FORD, Grayson, LEUNG, Kevin
Year of Publication 20.02.2020
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Year of Publication 20.02.2020
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MOVEABLE EDGE RING DESIGN
CASAES, Raphael, YAN, Haoquan, MCCHESNEY, Jon, PATERSON, Alex, O'NEILL, Robert Griffith
Year of Publication 10.01.2019
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Year of Publication 10.01.2019
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MOVEABLE EDGE COUPLING RING FOR EDGE PROCESS CONTROL DURING SEMICONDUCTOR WAFER PROCESSING
Jon McCHESNEY, Raphael CASAES, Haoquan YAN, Robert Griffith O'NEILL, Alex PATERSON
Year of Publication 30.10.2018
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Year of Publication 30.10.2018
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Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features and systems using the same
HAN, ZHUMIN, EHRLICH, DARRELL, CONTRERAS, ANTHONY, SANCHEZ, ALEJANDRO, CASAES, RAPHAEL, FORD, GRAYSON, WU, JOANNA, LEUNG, KEVIN, ALWAN, ARAVIND
Year of Publication 16.05.2024
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Year of Publication 16.05.2024
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Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features and systems using the same
HAN, ZHUMIN, EHRLICH, DARRELL, CONTRERAS, ANTHONY, SANCHEZ, ALEJANDRO, CASAES, RAPHAEL, FORD, GRAYSON, WU, JOANNA, LEUNG, KEVIN, ALWAN, ARAVIND
Year of Publication 21.01.2024
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Year of Publication 21.01.2024
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Ion beam etch system and method
YUN, SEOKMIN, CHENG, SHIH-YUAN, HUANG, SHUOGANG, CASAES, RAPHAEL, LIN, CHIH-MIN, CHANG, CHIH-YANG, MISHRA, ANURAG KUMAR
Year of Publication 16.05.2023
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Year of Publication 16.05.2023
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Moveable edge coupling ring for edge process control during semiconductor wafer processing
YAN, HAOQUAN, PATERSON, ALEX, CASAES, RAPHAEL, MCCHESNEY, JON, O'NEILL, ROBERT GRIFFITH
Year of Publication 01.06.2022
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Year of Publication 01.06.2022
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MOVEABLE EDGE COUPLING RING FOR EDGE PROCESS CONTROL DURING SEMICONDUCTOR WAFER PROCESSING
ROBERT GRIFFITH O'NEILL, ALEX PATERSON, RAPHAEL CASAES, JON MCCHESNEY, HAOQUAN YAN
Year of Publication 30.08.2016
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Year of Publication 30.08.2016
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MOVEABLE EDGE COUPLING RING FOR EDGE PROCESS CONTROL DURING SEMICONDUCTOR WAFER PROCESSING
YAN HAOQUAN, CASAES RAPHAEL, MCCHESNEY JON, PATERSON ALEX, O'NEILL ROBERT GRIFFITH
Year of Publication 21.07.2016
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Year of Publication 21.07.2016
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Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features and systems using the same
HAN, ZHUMIN, EHRLICH, DARRELL, CONTRERAS, ANTHONY, SANCHEZ, ALEJANDRO, CASAES, RAPHAEL, FORD, GRAYSON, WU, JOANNA, LEUNG, KEVIN, ALWAN, ARAVIND
Year of Publication 01.07.2022
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Year of Publication 01.07.2022
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