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Polishing composition and method for high silicon nitride to silicon oxide removal rate ratios
by
CARTER PHILLIP
,
JOHNS TIMOTHY
Year of Publication
31.10.2007
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Method of polishing a silicon-containing dielectric
by
CARTER PHILLIP
W.,
JOHNS TIMOTHY
P
Year of Publication
01.03.2006
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adhesives
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basic electric elements
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electric solid state devices not otherwise provided for
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esp@cenet
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