Atomic Layer Deposition of NiO by the Ni(thd)2/H2O Precursor Combination
Lindahl, Erik, Ottosson, Mikael, Carlsson, Jan-Otto
Published in Chemical vapor deposition (01.09.2009)
Published in Chemical vapor deposition (01.09.2009)
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Journal Article
Phase stability and oxygen doping in the Cu–N–O system
Fallberg, Anna, Ottosson, Mikael, Carlsson, Jan-Otto
Published in Journal of crystal growth (01.05.2010)
Published in Journal of crystal growth (01.05.2010)
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Journal Article
Phase Formation Behavior in Ultrathin Iron Oxide
Jõgi, Indrek, Jacobsson, T. Jesper, Fondell, Mattis, Wätjen, Timo, Carlsson, Jan-Otto, Boman, Mats, Edvinsson, Tomas
Published in Langmuir (17.11.2015)
Published in Langmuir (17.11.2015)
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Journal Article
CVD of Copper(I) Nitride
Fallberg, Anna, Ottosson, Mikael, Carlsson, Jan-Otto
Published in Chemical vapor deposition (01.12.2009)
Published in Chemical vapor deposition (01.12.2009)
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Journal Article
Gas-Pulsed CVD for Film Growth in the CuNiN System
Lindahl, Erik, Ottosson, Mikael, Carlsson, Jan-Otto
Published in Chemical vapor deposition (01.03.2012)
Published in Chemical vapor deposition (01.03.2012)
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Journal Article
Growth and stability of CVD Ni3N and ALD NiO dual layers
LINDAHL, Erik, OTTOSSON, Mikael, CARLSSON, Jan-Otto
Published in Surface & coatings technology (01.10.2010)
Published in Surface & coatings technology (01.10.2010)
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Journal Article
Atomic Layer Deposition of NiO by the Ni(thd) 2 /H 2 O Precursor Combination
Lindahl, Erik, Ottosson, Mikael, Carlsson, Jan‐Otto
Published in Chemical vapor deposition (01.09.2009)
Published in Chemical vapor deposition (01.09.2009)
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Journal Article
Atomic layer deposition of BN thin films
Mårlid, Björn, Ottosson, Mikael, Pettersson, Ulrika, Larsson, Karin, Carlsson, Jan-Otto
Published in Thin solid films (2002)
Published in Thin solid films (2002)
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Journal Article
Epitaxy of copper on α-Al2O3(001) by atomic layer deposition
TÖRNDAHL, Tobias, JUN LU, OTTOSSON, Mikael, CARLSSON, Jan-Otto
Published in Journal of crystal growth (15.03.2005)
Published in Journal of crystal growth (15.03.2005)
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Journal Article