RESISTIVITY-BASED ADJUSTMENT OF MEASUREMENTS FROM IN-SITU MONITORING
SWEDEK BOGUSLAW A, LIU TZU YU, XU KUN, CARLSSON INGEMAR, SHEN SHIH HAUR
Year of Publication 30.01.2023
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Year of Publication 30.01.2023
Patent
인-시튜 모니터링으로부터의 측정들의 비저항 기반 조정
SWEDEK BOGUSLAW A, LIU TZU YU, XU KUN, CARLSSON INGEMAR, SHEN SHIH HAUR
Year of Publication 22.08.2019
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Year of Publication 22.08.2019
Patent
HIGH SENSITIVITY EDDY CURRENT MONITORING SYSTEM
SWEDEK BOGUSLAW A, IRAVANI HASSAN G, TU WEN CHIANG, XU KUN, CARLSSON INGEMAR, SHEN SHIH HAUR
Year of Publication 14.12.2018
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Year of Publication 14.12.2018
Patent
Impact of Film Morphology on Chemical Mechanical Polishing of Tungsten
Xu, Kun, Shen, Shih-Haur, Fung, Jason, Iravani, Hassan, Carlsson, Ingemar, Liu, Tzu-Yu, Swedek, Bogdan, Chang, Shou-Sung, Tu, Wen-chiang, Kitajima, Tomohiko, Mikhaylich, Katrina, Brown, Brian, Huey, Sidney, Redeker, Fritz
Published in ECS journal of solid state science and technology (01.01.2016)
Published in ECS journal of solid state science and technology (01.01.2016)
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Journal Article
INDUCTIVE MONITORING OF CONDUCTIVE TRENCH DEPTH
LU WEI, SWEDEK BOGUSLAW A, WANG ZHEFU, WANG ZHIHONG, IRAVANI HASSAN G, BENVEGNU DOMINIC J, TU WEN CHIANG, CARLSSON INGEMAR
Year of Publication 20.02.2017
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Year of Publication 20.02.2017
Patent
ADJUSTING EDDY CURRENT MEASUREMENTS
SWEDEK BOGUSLAW A, BENNETT DOYLE E, IRAVANI HASSAN G, LIU TZU YU, TU WEN CHIANG, XU KUN, CARLSSON INGEMAR, SHEN SHIH HAUR
Year of Publication 14.10.2016
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Year of Publication 14.10.2016
Patent
DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR
SWEDEK BOGUSLAW A, BENNETT DOYLE E, IRAVANI HASSAN G, LIU TZU YU, TU WEN CHIANG, XU KUN, SHEN SHIH HAUR, CARLSSON INGEMAR
Year of Publication 04.07.2016
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Year of Publication 04.07.2016
Patent
Metal Clearing Process Control in Metal CMP
Xu, Kun, Carlsson, Ingemar, Liu, Tzu-Yu, Shen, Shih-Haur, Swedek, Bogdan, Wang, You, Xia, Xinyun, Bennett, Doyle, Tu, Wen-Chiang, Karuppiah, Lakshmanan
Published in ECS transactions (01.04.2013)
Published in ECS transactions (01.04.2013)
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Journal Article
HIGH SENSITIVITY EDDY CURRENT MONITORING SYSTEM
SWEDEK BOGUSLAW A, IRAVANI HASSAN G, TU WEN CHIANG, XU KUN, CARLSSON INGEMAR, SHEN SHIH HAUR
Year of Publication 07.03.2014
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Year of Publication 07.03.2014
Patent
FEEDBACK CONTROL USING DETECTION OF CLEARANCE AND ADJUSTMENT FOR UNIFORM TOPOGRAPHY
SWEDEK BOGUSLAW A, LIU TZU YU, TU WEN CHIANG, KARUPPIAH LAKSHMANAN, XU KUN, CARLSSON INGEMAR, SHEN SHIH HAUR
Year of Publication 06.11.2014
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Year of Publication 06.11.2014
Patent
IN-SITU MONITORING SYSTEM WITH MONITORING OF ELONGATED REGION
SWEDEK BOGUSLAW A, BENNETT DOYLE E, LIU TZU YU, IRAVANI HASSAN G, TU WEN CHIANG, XU KUN, SHEN SHIH HAUR, CARLSSON INGEMAR
Year of Publication 16.05.2014
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Year of Publication 16.05.2014
Patent
EDDY CURRENT MONITORING OF METAL RESIDUE OR METAL PILLARS
SWEDEK BOGUSLAW A, IRAVANI HASSAN G, TU WEN CHIANG, WANG JAMES C, GAGE DAVID MAXWELL, XU KUN, CARLSSON INGEMAR, SHEN SHIH HAUR
Year of Publication 07.03.2014
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Year of Publication 07.03.2014
Patent
ENDPOINT CONTROL OF MULTIPLE-WAFER CHEMICAL MECHANICAL POLISHING
JEW STEPHEN, SWEDEK BOGUSLAW A, OSTERHELD THOMAS H, ZHANG JIMIN, CARLSSON INGEMAR
Year of Publication 18.08.2011
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Year of Publication 18.08.2011
Patent