ROBOT FOR SIMULTANEOUS SUBSTRATE TRANSFER
MUTHUKAMATCHI KARUPPASAMY, RIORDON BENJAMIN, CARLSON CHARLES T, BONECUTTER LUKE, HUDGENS JEFF, SCHALLER JASON M, THANU RAJKUMAR
Year of Publication 03.09.2024
Get full text
Year of Publication 03.09.2024
Patent
회전 여자기를 갖는 공진기, 선형 가속기 구성 및 이온 주입 시스템
BILOIU COSTEL, SINCLAIR FRANK, CARLSON CHARLES T, TAM WAI MING, BLAHNIK DAVID T
Year of Publication 20.06.2024
Get full text
Year of Publication 20.06.2024
Patent
내부 지지 구조를 갖는 보강된 RF LINAC 코일 인덕터
WEBB AARON P, SINCLAIR FRANK, CARLSON CHARLES T, MURPHY PAUL J, BLAHNIK DAVID
Year of Publication 07.05.2024
Get full text
Year of Publication 07.05.2024
Patent
공진기, 선형 가속기 구성 및 토로이드형 공진기를갖는 이온 주입 시스템
BILOIU COSTEL, SINCLAIR FRANK, CARLSON CHARLES T, BLAHNIK DAVID T, MURPHY PAUL J
Year of Publication 25.07.2023
Get full text
Year of Publication 25.07.2023
Patent
공진기 및 이온 주입기의 공진기
HONAN MICHAEL, BILOIU COSTEL, SINCLAIR FRANK, CARLSON CHARLES T, MURPHY PAUL, VOPAT ROBERT B, BLAHNIK DAVID
Year of Publication 01.09.2022
Get full text
Year of Publication 01.09.2022
Patent
캐리어 근접 마스크에 대한 방법 및 디바이스
MAGEE RYAN, CARLSON CHARLES T, MEYER TIMMERMAN THIJSSEN RUTGER, BANDY ROSS, EVANS MORGAN
Year of Publication 25.05.2022
Get full text
Year of Publication 25.05.2022
Patent
캐리어 근접 마스크에 대한 방법 및 디바이스
CARLSON CHARLES T, MEYER TIMMERMAN THIJSSEN RUTGER, BANDY ROSS, EVANS MORGAN
Year of Publication 17.05.2022
Get full text
Year of Publication 17.05.2022
Patent
동시 기판 이송을 위한 로봇
MUTHUKAMATCHI KARUPPASAMY, RIORDON BENJAMIN, CARLSON CHARLES T, BONECUTTER LUKE, HUDGENS JEFF, SCHALLER JASON M, THANU RAJKUMAR
Year of Publication 11.03.2022
Get full text
Year of Publication 11.03.2022
Patent
고밀도 기판 프로세싱 시스템들 및 방법들
NGUYEN TUAN A, SRINIVASAN SWAMINATHAN T, CARLSON CHARLES T, SCHALLER JASON M, HONGKHAM STEVE, PAUL KHOKAN CHANDRA
Year of Publication 11.03.2022
Get full text
Year of Publication 11.03.2022
Patent
고압 스팀 어닐링 프로세싱 장치
CARLSON CHARLES T, BLAHNIK JEFFREY CHARLES, FRANKLIN TIMOTHY JOSEPH, SCHALLER JASON M, BLAHNIK DAVID, WEBB AARON, VOPAT ROBERT BRENT
Year of Publication 25.06.2020
Get full text
Year of Publication 25.06.2020
Patent