LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
CARLO CORNELIS MARIA LUIJTEN, MAKSYM CHERNYSHOV, JANSSEN FRANCISCUS JOHANNES JOSEPH, MANISH RANJAN
Year of Publication 21.12.2017
Get full text
Year of Publication 21.12.2017
Patent
LITHOGRAPHIC APPARATUS AND METHOD
PAULUS ALBERTUS MARIA GASSELING, LUIGI SCACCABAROZZI, HANS JOERG MALLMANN, ALEXANDER MARINUS ARNOLDUS HUIJBERTS, VAN KAMPEN MAARTEN, ARTHUR WINFRIED EDUARDUS MINNAERT, KURSAT BAL, BANINE VADIM YEVGENYEVICH, CARLO CORNELIS MARIA LUIJTEN, JOHANNUS ELISABETH HUBERTUS MUITJENS, NICOLAAS ALDEGONDA JAN MARIA VAN AERLE, HAN-KWANG NIENHUYS, YAKUNIN ANDREY MIKHAILOVICH, PEDRO JULIAN RIZO DIAGO
Year of Publication 12.04.2018
Get full text
Year of Publication 12.04.2018
Patent
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
Yudhistira, Yasri, Luijten, Carlo Cornelis Maria, Van Oosten, Anton Bernhard, Verstraeten, Bert, Gemmink, Jan-Willem, Staals, Frank
Year of Publication 06.07.2021
Get full text
Year of Publication 06.07.2021
Patent
Methods and Patterning Devices and Apparatuses for Measuring Focus Performance of a Lithographic Apparatus, Device Manufacturing Method
LUIJTEN, Carlo Cornelis Maria, YUDHISTIRA, Yasri, GEMMINK, Jan-Willem, VAN OOSTEN, Anton Bernhard, STAALS, Frank, VERSTRAETEN, Bert
Year of Publication 07.05.2020
Get full text
Year of Publication 07.05.2020
Patent
METROLOGY METHOD AND METHOD OF DEVICE MANUFACTURE
LUIJTEN, Carlo Cornelis Maria, VAN GORP, Simon Hendrik Celine, THUIJS, Koen, STAALS, Frank
Year of Publication 19.09.2018
Get full text
Year of Publication 19.09.2018
Patent
Method of calibrating focus measurements, measurement method and metrology apparatus, lithographic system and device manufacturing method
Van Der Poel, Cornelis Andreas Franciscus Johannes, Ridane, Mohamed, Segers, Bart Peter Bert, Li, Fahong, Luijten, Carlo Cornelis Maria, Garcia Granda, Miguel, Van Oosten, Anton Bernhard, Staals, Frank
Year of Publication 25.02.2020
Get full text
Year of Publication 25.02.2020
Patent
Metrology Method and Method of Device Manufacture
CARLO CORNELIS MARIA LUIJTEN, SIMON HENDRIK CELINE VAN GORP, FRANK STAALS, KOEN THUIJS
Year of Publication 13.02.2018
Get full text
Year of Publication 13.02.2018
Patent
METHODS AND PATTERNING DEVICES AND APPARATUSES FOR MEASURING FOCUS PERFORMANCE OF A LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD
LUIJTEN, Carlo, Cornelis, Maria, YUDHISTIRA, Yasri, GEMMINK, Jan-Willem, STAALS, Frank, VAN OOSTEN, Anton, Bernhard, VERSTRAETEN, Bert
Year of Publication 02.01.2019
Get full text
Year of Publication 02.01.2019
Patent
Lithographic apparatus and device manufacturing method
Chernyshov Maksym, Luijten Carlo Cornelis Maria, Janssen Franciscus Johannes Joseph, Ranjan Manish
Year of Publication 21.11.2017
Get full text
Year of Publication 21.11.2017
Patent
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
RANJAN Manish, JANSSEN Franciscus Johannes Joseph, LUIJTEN Carlo Cornelis Maria, CHERNYSHOV Maksym
Year of Publication 22.06.2017
Get full text
Year of Publication 22.06.2017
Patent
Lithographic apparatus and device manufacturing method
Chernyshov Maksym, Luijten Carlo Cornelis Maria, Janssen Franciscus Johannes Joseph, Ranjan Manish
Year of Publication 18.04.2017
Get full text
Year of Publication 18.04.2017
Patent