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Year of Publication 25.07.2024
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Year of Publication 10.11.2023
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SUBSTRATE SUPPORT GAP PUMPING TO PREVENT GLOW DISCHARGE AND LIGHT-UP
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Year of Publication 23.10.2024
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SUBSTRATE SUPPORT GAP PUMPING TO PREVENT GLOW DISCHARGE AND LIGHT-UP
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Year of Publication 22.06.2023
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Year of Publication 22.06.2023
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SUBSTRATE SUPPORT GAP PUMPING TO PREVENT GLOW DISCHARGE AND LIGHT-UP
RODRIGUES, Silverst Antony, CARDUCCI, James David, RAMASWAMY, Kartik, RICE, Michael R, YANG, Yang, COLLINS, Kenneth S
Year of Publication 22.06.2023
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Year of Publication 22.06.2023
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Year of Publication 15.09.2022
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Year of Publication 15.09.2022
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SUBSTRATE EDGE RING THAT EXTENDS PROCESS ENVIRONMENT BEYOND SUBSTRATE DIAMETER
CARDUCCI, James David, RAMASWAMY, Kartik, RICE, Michael R, COLLINS, Kenneth S, RAUF, Shahid
Year of Publication 15.09.2022
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Year of Publication 15.09.2022
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METHODS AND APPARATUS FOR SHIELDING SUBSTRATE SUPPORTS
CARDUCCI, James David, RAMASWAMY, Kartik, RICE, Michael R, COLLINS, Kenneth S
Year of Publication 18.04.2019
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Year of Publication 18.04.2019
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Substrate support gap pumping to prevent glow discharge and light-up
RODRIGUES, SILVERST ANTONY, CARDUCCI, JAMES DAVID, COLLINS, KENNETH S, RICE, MICHAEL R, YANG, YANG, RAMASWAMY, KARTIK
Year of Publication 16.08.2023
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Year of Publication 16.08.2023
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Substrate edge ring that extends process environment beyond substrate diameter
CARDUCCI, JAMES DAVID, COLLINS, KENNETH S, RAUF, SHAHID, RICE, MICHAEL R, RAMASWAMY, KARTIK
Year of Publication 01.01.2023
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Year of Publication 01.01.2023
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Adjusting DC bias voltage in plasma chambers
WELCH; MICHAEL D, CARDUCCI; JAMES DAVID, LUSCHER; PAUL ERNEST, BLUME; RICHARD, PU; BRYAN, LEE; EVANS YIP, SHAN; HONG CHING, WU; ROBERT W
Year of Publication 06.04.1999
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Year of Publication 06.04.1999
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Adjusting DC bias voltage in plasma chamber
SHAN HONGCHING, PU, BRYAN, LUSCHER, PAUL ERNEST, WELCH, MICHAEL D, CARDUCCI, JAMES DAVID, LEE, EVANS YIP, WU, ROBERT W, BLUME, RICHARD
Year of Publication 12.08.1998
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Year of Publication 12.08.1998
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PLASMA CHAMBER
SHAN HONGCHING, LUSCHER PAUL ERNEST, BLUME RICHARD, LEE EVANS YIP, WU ROBERT W, WELCH MICHAEL D, CARDUCCI JAMES DAVID, PU BRYAN
Year of Publication 10.03.1998
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Year of Publication 10.03.1998
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Adjusting DC bias voltage in plasma chamber
SHAN HONGCHING, PU, BRYAN, LUSCHER, PAUL ERNEST, WELCH, MICHAEL D, CARDUCCI, JAMES DAVID, LEE, EVANS YIP, WU, ROBERT W, BLUME, RICHARD
Year of Publication 29.12.1997
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Year of Publication 29.12.1997
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