Process and chamber health monitoring of plasma enhanced ti deposition process through high performance VI-probe
Kye Hyun Baek, Coonan, B., Carbery, M., Jinkyung Joo, Hyunsoo Woo, Tae Soon Lee, Hyeon Soo An, Yoonbon Koo, Cheonsu Han, Sungho Han, Yongjin Kim, Seong Woon Choi, Woosung Han
Published in 2007 International Symposium on Semiconductor Manufacturing (01.10.2007)
Published in 2007 International Symposium on Semiconductor Manufacturing (01.10.2007)
Get full text
Conference Proceeding