Novel 3D PZT thin film structure for micromechanics
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Conference Proceeding
Journal Article
Chemically derived seeding layer for {100}-textured PZT thin films
TYHOLDT, F, CALAME, F, PRUME, K, RAEDER, H, MURALT, P
Published in Journal of electroceramics (01.12.2007)
Published in Journal of electroceramics (01.12.2007)
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Conference Proceeding
Journal Article
Taking piezoelectric microsystems from the laboratory to production
RAEDER, H, TYHOLDT, F, BOOIJ, W, CALAME, F, OSTBO, N. P, BREDESEN, R, PRUME, K, RIJNDERS, G, MURALT, P
Published in Journal of electroceramics (01.12.2007)
Published in Journal of electroceramics (01.12.2007)
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Conference Proceeding
Journal Article
Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications
Steen, J A J, Hayakawa, J, Harada, T, Lee, K, Calame, F, Boero, G, Kulik, A J, Brugger, J
Published in Nanotechnology (14.03.2006)
Published in Nanotechnology (14.03.2006)
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Journal Article
Vibration Energy Harvesting with PZT Micro Device
Muralt, P., Marzencki, M., Belgacem, B., Calame, F., Basrour, S.
Published in Procedia chemistry (01.09.2009)
Published in Procedia chemistry (01.09.2009)
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Journal Article
Local Growth of Sol-Gel Films by Means of Microhotplates
Calame, F., Baborowski, J., Ledermann, N., Muralt, P., Gentil, S., Setter, N.
Published in Integrated ferroelectrics (01.04.2003)
Published in Integrated ferroelectrics (01.04.2003)
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Journal Article
Gradient free sol-gel Pb(Zrx, Ti1-x)O3 thin films
Calame, F., Muralt, P.
Published in 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics (01.05.2007)
Published in 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics (01.05.2007)
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Conference Proceeding
Local growth of sol-gel films by means of microhotplates
Calame, F., Baborowski, J., Ledermann, N., Muralt, P.
Published in TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) (2003)
Published in TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) (2003)
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Conference Proceeding
Piezoelectric Micromachined Ultrasonic Transducers based on PZT films
Belgacem, B., Calame, F., Muralt, P.
Published in 2006 15th ieee international symposium on the applications of ferroelectrics (01.07.2006)
Published in 2006 15th ieee international symposium on the applications of ferroelectrics (01.07.2006)
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Conference Proceeding
5I-2 Thick PZT Sol-Gel Films for pMUT Transducers Performances Improvement
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Conference Proceeding
LOCAL GROWTH OF SOL-GEL FILMS BY MEANS OF MICROHOTPLATES
CALAME, F., BABOROWSKI, J., LEDERMANN, N., MURALT, P.
Published in International journal of computational engineering science (IJCES) (01.09.2003)
Published in International journal of computational engineering science (IJCES) (01.09.2003)
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Journal Article