The Potential for Economic Application of Maskless Lithography in Semiconductor Manufacturing
Berglund, C.N., Leachman, R.C.
Published in IEEE transactions on semiconductor manufacturing (01.02.2010)
Published in IEEE transactions on semiconductor manufacturing (01.02.2010)
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Journal Article
High-throughput mapping of short-range spatial variations using active electrical metrology
Xu Ouyang, Berglund, C.N., Fabian, R.
Published in IEEE transactions on semiconductor manufacturing (01.02.2002)
Published in IEEE transactions on semiconductor manufacturing (01.02.2002)
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Journal Article
Mask Cost and Profitability in Photomask Manufacturing: An Empirical Analysis
Weber, C.M., Berglund, C.N., Gabella, P.
Published in IEEE transactions on semiconductor manufacturing (01.11.2006)
Published in IEEE transactions on semiconductor manufacturing (01.11.2006)
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Journal Article
Benchmarking the Productivity of Photomask Manufacturers
Berglund, C.N., Weber, C.M., Gabella, P.
Published in IEEE transactions on semiconductor manufacturing (01.11.2009)
Published in IEEE transactions on semiconductor manufacturing (01.11.2009)
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Journal Article
An Empirical Study of Photomask Manufacturing Productivity
Berglund, C.N., Weber, C.M., Castilla, C.
Published in The 17th Annual SEMI/IEEE ASMC 2006 Conference (2006)
Published in The 17th Annual SEMI/IEEE ASMC 2006 Conference (2006)
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Conference Proceeding
High-throughput high-density mapping and spectrum analysis of transistor gate length variations in SRAM circuits
Xu Ouyang, Deeter, T., Berglund, C.N., Pease, R.F.W., Lee, J., McCord, M.A.
Published in IEEE transactions on semiconductor manufacturing (01.11.2001)
Published in IEEE transactions on semiconductor manufacturing (01.11.2001)
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Journal Article
Conference Proceeding
Revenue-Based Metrics for Managing the New Product Introduction Process
Berglund, C.N., Harmon, R.R.
Published in PICMET '07 - 2007 Portland International Conference on Management of Engineering & Technology (01.08.2007)
Published in PICMET '07 - 2007 Portland International Conference on Management of Engineering & Technology (01.08.2007)
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Conference Proceeding
Photomask Manufacturing: An Example of Synchronized Ecosystem Learning
Berglund, C.N., Weber, C.M.
Published in PICMET '07 - 2007 Portland International Conference on Management of Engineering & Technology (01.08.2007)
Published in PICMET '07 - 2007 Portland International Conference on Management of Engineering & Technology (01.08.2007)
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Conference Proceeding