The Development of the Non-contact Electrical Leakage Property Measurement System for the High-K Dielectric Materials on DRAM Capacitors
Yusin Yang, Byung Sug Lee, Misung Lee, Chung Sam Jun, Tae Sung Kim
Published in The 17th Annual SEMI/IEEE ASMC 2006 Conference (2006)
Published in The 17th Annual SEMI/IEEE ASMC 2006 Conference (2006)
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Conference Proceeding
Method of inspecting for defects and apparatus for performing the method
Yang, Yu-Sin, Jun, Chung-Sam, Chung, Ki-Suk, Kim, Tae-Sung, Lee, Byung-Sug
Year of Publication 03.02.2009
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Year of Publication 03.02.2009
Patent
Method of inspecting for defects and apparatus for performing the method
JUN CHUNG-SAM, CHUNG KI-SUK, KIM TAE-SUNG, YANG YU-SIN, LEE BYUNG-SUG
Year of Publication 03.02.2009
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Year of Publication 03.02.2009
Patent
Method of classifying defects
Chung, Ki-Suk, Jun, Chung-Sam, Yang, Yu-Sin, Lee, Byung-Sug, Shin, Ji-Young, Kim, Tae-Sung
Year of Publication 04.11.2008
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Year of Publication 04.11.2008
Patent
Method of classifying defects
JUN CHUNG-SAM, CHUNG KI-SUK, KIM TAE-SUNG, SHIN JI-YOUNG, YANG YU-SIN, LEE BYUNG-SUG
Year of Publication 04.11.2008
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Year of Publication 04.11.2008
Patent
METHOD OF INSPECTING A DEFECT AND APPARATUS FOR INSPECTING A DEFECT USING THE SAME
JUN, CHUNG SAM, KIM, TAE SUNG, LEE, BYUNG SUG, YANG, YU SIN, CHUNG, KI SUK
Year of Publication 05.01.2007
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Year of Publication 05.01.2007
Patent
Method of inspecting for defects and apparatus for performing the method
JUN CHUNG-SAM, CHUNG KI-SUK, KIM TAE-SUNG, YANG YU-SIN, LEE BYUNG-SUG
Year of Publication 04.01.2007
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Year of Publication 04.01.2007
Patent
Method and apparatus for inspecting substrate pattern
Kim, Kye-Weon, Jun, Chung-Sam, Chung, Ki-Suk, Chon, Sang-Mun, Kim, Seong-Jin, Lee, Byung-Sug, Yang, Yu-Sin
Year of Publication 10.06.2008
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Year of Publication 10.06.2008
Patent
Method and apparatus for inspecting substrate pattern
JUN CHUNG-SAM, KIM KYE-WEON, CHUNG KI-SUK, CHON SANG-MUN, KIM SEONG-JIN, YANG YU-SIN, LEE BYUNG-SUG
Year of Publication 10.06.2008
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Year of Publication 10.06.2008
Patent
METHOD FOR MEASURING A CHARACTERISTIC OF A THIN LAYER AND APPARATUS FOR PERFORMING THE SAME
JUN, CHUNG SAM, LEE, BYUNG SUG, EOM, TAE MIN, YANG, YU SIN, JEE, YUN JUNG
Year of Publication 15.02.2006
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Year of Publication 15.02.2006
Patent
METHOD OF CLASSIFYING DEFECTS
JUN CHUNG-SAM, CHUNG KI-SUK, KIM TAE-SUNG, SHIN JI-YOUNG, YANG YU-SIN, LEE BYUNG-SUG
Year of Publication 22.02.2007
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Year of Publication 22.02.2007
Patent
METHOD FOR CLASSIFYING A DEFECT
JUN, CHUNG SAM, SHIN, JI YOUNG, LEE, BYUNG SUG, KIM, TAE SUNG, CHUNG, KI SUK, YANG, YU SIN
Year of Publication 05.12.2006
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Year of Publication 05.12.2006
Patent