SOI-based fabrication processes of the scanning mirror having vertical comb fingers
Lee, Jin-Ho, Ko, Young-Chul, Jeong, Hee-Moon, Choi, Byoung-So, Kim, Jong-Min, Jeon, Duk Young
Published in Sensors and actuators. A. Physical. (01.12.2002)
Published in Sensors and actuators. A. Physical. (01.12.2002)
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Journal Article
Characterization of Silicon Scanning Mirror for Laser Display
Lee, Jin-Ho, Ko, Young-Chul, Choi, Byoung-So, Kim, Jong-Min, Jeon, Duk Young
Published in Japanese Journal of Applied Physics (2002)
Published in Japanese Journal of Applied Physics (2002)
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Journal Article
Bonding of silicon scanning mirror having vertical comb fingers
Lee, Jin-Ho, Ko, Young-Chul, Choi, Byoung-So, Kim, Jong-Min, Jeon, Duk Young
Published in Journal of micromechanics and microengineering (01.09.2002)
Published in Journal of micromechanics and microengineering (01.09.2002)
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Journal Article
SOI-fabrication of scanning mirror for laser display
Jin-Ho Lee, Young-Chul Ko, Byoung-So Choi, Jong-Min Kim, Duk Young Jeon
Published in IEEE/LEOS International Conference on Optical MEMs (2002)
Published in IEEE/LEOS International Conference on Optical MEMs (2002)
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Conference Proceeding