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Energy distribution of bombarding ions in plasma etching of dielectrics
by
Buzzi
,
F L
,
Ting, Y-H
,
Wendt, A E
Published in
Plasma sources science & technology
(01.05.2009)
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Format
Journal Article
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Subject Area
physics
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Topic
etching and cleaning
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exact sciences and technology
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physical sciences
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physics
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physics of gases, plasmas and electric discharges
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physics of plasmas and electric discharges
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Language
English
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Institute of Physics (IOP) Publishing Journals
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