Radio frequency diagnostics for plasma etch systems
BUSHMAN, S, EDGAR, T. F, TRACHTENBERG, I
Published in Journal of the Electrochemical Society (01.02.1997)
Published in Journal of the Electrochemical Society (01.02.1997)
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Journal Article
PROCESS METHOD TO FABRICATE CMOS CIRCUITS WITH DUAL STRESS CONTACT ETCH-STOP LINER LAYERS
BUSHMAN SCOTT GREGORY, DELOACH JUANITA, YU SHAOFENG, SMITH BRIAN A, OBENG YAW S
Year of Publication 22.01.2009
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Year of Publication 22.01.2009
Patent