Reduction of mechanical losses in ion-beam sputtered tantalum oxide thin films via partial crystallization
Favaro, Giulio, Milotti, Valeria, Alonso Diaz Riega, Diego, Busdon, Nicole, Bazzan, Marco, Granata, Massimo, Hofman, David, Michel, Christophe, Pinard, Laurent, Conti, Livia, Capaccioli, Simone, Shcheblanov, Nikita S, Lemaître, Anaël, Martinez, Valérie, Cagnoli, Gianpietro, Piergiovanni, Francesco, Fabrizi, Federica, Pelizzo, Maria G, Corso, Alain J
Published in Classical and quantum gravity (16.05.2024)
Published in Classical and quantum gravity (16.05.2024)
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