Enhanced ferroelectric properties of multilayer SBT-BTN thin films for NVRAM applications
Khorkhordin, O., Yeh, C. P., Kalkofen, B., Burte, E. P.
Published in Integrated ferroelectrics (21.11.2016)
Published in Integrated ferroelectrics (21.11.2016)
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The role of hydrogen in hot wire chemical vapor deposition of Ge-Sb-Te thin films
Reso, D., Silinskas, M., Lisker, M., Gewalt, A., Burte, E.P.
Published in Thin solid films (31.01.2011)
Published in Thin solid films (31.01.2011)
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Growth of germanium sulfide by hot wire chemical vapor deposition for nonvolatile memory applications
Reso, D., Silinskas, M., Lisker, M., Burte, E.P.
Published in Journal of non-crystalline solids (01.07.2012)
Published in Journal of non-crystalline solids (01.07.2012)
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Low pressure chemical vapour deposition of tantalum pentoxide thin layers
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Conference Proceeding
ELECTRICAL CHARACTERIZATION OF ZIRCONIUM OXIDE LAYERS GROWN BY LIQUID DELIVERY MOCVD
LISKER, M., SILINSKAS, M., MATICHYN, S., BURTE, E. P.
Published in Integrated ferroelectrics (01.01.2005)
Published in Integrated ferroelectrics (01.01.2005)
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Journal Article
Iridium Thin Films Deposited by Liquid Delivery MOCVD using Ir(EtCp)(1,5-COD) with Toluene Solvent
Ritterhaus, Y., Hur'yeva, T., Lisker, M., Burte, E. P.
Published in Chemical vapor deposition (01.12.2007)
Published in Chemical vapor deposition (01.12.2007)
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Investigation of strontium tantalate thin films for high-k gate dielectric applications
Silinskas, M., Lisker, M., Kalkofen, B., Burte, E.P.
Published in Materials science in semiconductor processing (01.12.2006)
Published in Materials science in semiconductor processing (01.12.2006)
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Journal Article
Conference Proceeding
Electrical properties of thin reoxidized dual-layer oxides
Bauer, A.J., Wang, J., Aderhold, W.R., Burte, E.P., Ryssel, H.
Published in Thin solid films (10.08.1993)
Published in Thin solid films (10.08.1993)
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Characterization of ultrathin ON stacked layers consisting of thermally grown bottom oxide and deposited silicon nitride
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Conference Proceeding
STRUCTURAL AND ELECTRICAL CHARACTERIZATION OF HIGH-k STRONTIUM TANTALATE DEPOSITED BY LIQUID DELIVERY MOCVD
SILINSKAS, M., LISKER, M., BURTE, E. P., VEIT, P.
Published in Integrated ferroelectrics (01.01.2006)
Published in Integrated ferroelectrics (01.01.2006)
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Journal Article
Optimization of electric properties of high- k zirconium dioxide by varying deposition and annealing conditions
Silinskas, M., Lisker, M., Matichyn, S., Kalkofen, B., Burte, E.P.
Published in Materials science in semiconductor processing (01.12.2006)
Published in Materials science in semiconductor processing (01.12.2006)
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Conference Proceeding
Formation of rhodium silicide by rapid thermal annealing and by ion beam mixing
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Conference Proceeding
FABRICATION OF FERROELECTRIC PZT THIN FILMS BY LIQUID DELIVERY MOCVD USING NOVEL Zr and Ti PRECURSORS
YEH, C. P., LISKER, M., VEZIN, V., SEITZINGER, B., BAUMANN, P. K., GARKE, B., BLÄSING, J., KROST, A., BURTE, E. P.
Published in Integrated ferroelectrics (01.01.2008)
Published in Integrated ferroelectrics (01.01.2008)
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