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Year of Publication 20.07.2010
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Selective nitridation of gate oxides
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Selective nitridation of gate oxides
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Year of Publication 06.08.2008
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SELECTIVE NITRIDATION OF GATE OXIDES
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Selective nitridation of gate oxides
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Year of Publication 21.11.2006
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Selective nitridation of gate oxides
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Semiconductor metal contamination reduction for ultra-thin gate dielectrics
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METHOD FOR FABRICATING A NITRIDED SILICON-OXIDE GATE DIELECTRIC
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Year of Publication 17.01.2008
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