Micromachining of buried micro channels in silicon
de Boer, M.J., Tjerkstra, R.W., Berenschot, J.W., Jansen, H.V., Burger, G.J., Gardeniers, J.G.E., Elwenspoek, M., van den Berg, A.
Published in Journal of microelectromechanical systems (01.03.2000)
Published in Journal of microelectromechanical systems (01.03.2000)
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Journal Article
A micromachined silicon valve driven by a miniature bi-stable electro-magnetic actuator
Böhm, S, Burger, G.J, Korthorst, M.T, Roseboom, F
Published in Sensors and actuators. A. Physical. (01.03.2000)
Published in Sensors and actuators. A. Physical. (01.03.2000)
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Journal Article
High Resolution Shadow Mask Patterning In Deep Holes And Its Application To An Electrical Wafer Feed-through
Burger, G.J., Smulders, E.J.T., Berenschot, J.W., Lammerink, T.S.J., Fluitman, J.H.J., Imai, S.
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
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Conference Proceeding