Ion beam sputter deposition of Ge films: Influence of process parameters on film properties
Bundesmann, C., Feder, R., Wunderlich, R., Teschner, U., Grundmann, M., Neumann, H.
Published in Thin solid films (31.08.2015)
Published in Thin solid films (31.08.2015)
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Journal Article
Ion beam sputtering of Ti: Influence of process parameters on angular and energy distribution of sputtered and backscattered particles
Lautenschläger, T., Feder, R., Neumann, H., Rice, C., Schubert, M., Bundesmann, C.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (15.10.2016)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (15.10.2016)
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Journal Article
Systematic investigations of low energy Ar ion beam sputtering of Si and Ag
Feder, R., Frost, F., Neumann, H., Bundesmann, C., Rauschenbach, B.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (15.12.2013)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (15.12.2013)
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Journal Article
Sputter yields of Mo, Ti, W, Al, Ag under xenon ion incidence
Tartz, M., Heyn, T., Bundesmann, C., Zimmermann, C., Neumann, H.
Published in The European physical journal. D, Atomic, molecular, and optical physics (01.02.2011)
Published in The European physical journal. D, Atomic, molecular, and optical physics (01.02.2011)
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Journal Article
Note: An advanced in situ diagnostic system for characterization of electric propulsion thrusters and ion beam sources
Bundesmann, C, Tartz, M, Scholze, F, Leiter, H J, Scortecci, F, Gnizdor, R Y, Neumann, H
Published in Review of scientific instruments (01.04.2010)
Published in Review of scientific instruments (01.04.2010)
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Journal Article
Infrared dielectric functions and crystal orientation of a-plane ZnO thin films on r-plane sapphire determined by generalized ellipsometry
Bundesmann, C., Ashkenov, N., Schubert, M., Rahm, A., Wenckstern, H.v., Kaidashev, E.M., Lorenz, M., Grundmann, M.
Published in Thin solid films (01.05.2004)
Published in Thin solid films (01.05.2004)
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Journal Article
Low temperature photoluminescence and infrared dielectric functions of pulsed laser deposited ZnO thin films on silicon
Heitsch, S., Bundesmann, C., Wagner, G., Zimmermann, G., Rahm, A., Hochmuth, H., Benndorf, G., Schmidt, H., Schubert, M., Lorenz, M., Grundmann, M.
Published in Thin solid films (21.02.2006)
Published in Thin solid films (21.02.2006)
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Journal Article
Infrared ellipsometry characterization of conducting thin organic films
Schubert, M., Bundesmann, C., Jakopic, G., Maresch, H., Arwin, H., Persson, N.-C., Zhang, F., Inganäs, O.
Published in Thin solid films (01.05.2004)
Published in Thin solid films (01.05.2004)
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Journal Article
Systematic investigation of the properties of TiO2 films grown by reactive ion beam sputter deposition
Bundesmann, C., Lautenschläger, T., Spemann, D., Finzel, A., Thelander, E., Mensing, M., Frost, F.
Published in Applied surface science (01.11.2017)
Published in Applied surface science (01.11.2017)
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Journal Article
Roughness and damage of a GaAs surface after chemically assisted ion beam etching with Cl 2/Ar
Dienelt, J., Zimmer, K., von Sonntag, J., Rauschenbach, B., Bundesmann, C.
Published in Microelectronic engineering (01.03.2005)
Published in Microelectronic engineering (01.03.2005)
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Journal Article
Roughness and damage of a GaAs surface after chemically assisted ion beam etching with Cl2/Ar
DIENELT, J, ZIMMER, K, VON SONNTAG, J, RAUSCHENBACH, B, BUNDESMANN, C
Published in Microelectronic engineering (01.03.2005)
Published in Microelectronic engineering (01.03.2005)
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Conference Proceeding
Journal Article
Reactive Ar ion beam sputter deposition of TiO2 films: Influence of process parameters on film properties
Bundesmann, C., Lautenschläger, T., Thelander, E., Spemann, D.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (15.03.2017)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (15.03.2017)
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Journal Article
Investigation of the free charge carrier properties at the ZnO-sapphire interface in a-plane ZnO films studied by generalized infrared ellipsometry
Sturm, C., Chavdarov, T., Schmidt-Grund, R., Rheinländer, B., Bundesmann, C., Hochmuth, H., Lorenz, M., Schubert, M., Grundmann, M.
Published in Physica status solidi. C (01.05.2008)
Published in Physica status solidi. C (01.05.2008)
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Journal Article
Optical and electrical properties of epitaxial (Mg,Cd)xZn1−xO, ZnO, and ZnO:(Ga,Al) thin films on c-plane sapphire grown by pulsed laser deposition
Lorenz, M., Kaidashev, E.M., von Wenckstern, H., Riede, V., Bundesmann, C., Spemann, D., Benndorf, G., Hochmuth, H., Rahm, A., Semmelhack, H.-C., Grundmann, M.
Published in Solid-state electronics (01.12.2003)
Published in Solid-state electronics (01.12.2003)
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Journal Article
Modelling of a radio frequency plasma bridge neutralizer (RFPBN)
Scholze, F., Eichhorn, C., Bundesmann, C., Spemann, D., Neumann, H., Bulit, A., Feili, D., Amo, J. Gonzalez del
Published in Procedia engineering (2017)
Published in Procedia engineering (2017)
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Journal Article
Photochemical preparation of aluminium oxide layers via vacuum ultraviolet irradiation of a polymeric hexanoato aluminium complex
Wennrich, L., Khalil, H., Bundesmann, C., Decker, U., Gerlach, J.W., Helmstedt, U., Manova, D., Naumov, S., Prager, L.
Published in Materials chemistry and physics (15.01.2013)
Published in Materials chemistry and physics (15.01.2013)
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Journal Article