XPS investigation of the interaction between ECR-excited hydrogen and the native oxide of GaAs (100)
Mikhailov, G.M., Bulkin, P.V., Khudobin, S.A., Chumakov, A.A., Shapoval, S.Yu
Published in Vacuum (01.03.1992)
Published in Vacuum (01.03.1992)
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Journal Article
Automation of an electron cyclotron resonance plasma system for the manufacturing of inhomogeneous optical coatings for sensor applications
Chtcherbakov, A.A., Swart, P.L., Lacquet, B.M., Bulkin, P.V.
Published in IEEE International Symposium on Industrial Electronics. Proceedings. ISIE'98 (Cat. No.98TH8357) (1998)
Published in IEEE International Symposium on Industrial Electronics. Proceedings. ISIE'98 (Cat. No.98TH8357) (1998)
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Conference Proceeding
Compact ECR-source of ions and radicals for semiconductor surface treatment
Shapoval, S.Yu, Bulkin, P.V., Chumakov, A.A., Khudobin, S.A., Maximov, I., Mikhailov, G.M.
Published in Vacuum (1992)
Published in Vacuum (1992)
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Journal Article