Apparatus for post exposure bake of photoresist
Lubomirsky, Dmitry, Dukovic, John O, Buchberger, Jr., Douglas A, Nemani, Srinivas D
Year of Publication 19.03.2024
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Year of Publication 19.03.2024
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Apparatus for post exposure bake of photoresist
Lubomirsky, Dmitry, Dukovic, John O, Buchberger, Jr., Douglas A, Nemani, Srinivas D
Year of Publication 14.11.2023
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Year of Publication 14.11.2023
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CHAMBER AND METHODS OF COOLING A SUBSTRATE AFTER BAKING
LIANG, Qiwei, YIEH, Ellie Y, ATHANI, Shekhar, TSO, Alan L, BUCHBERGER, Jr., Douglas A, LUBOMIRSKY, Dmitry, KIM, Hyunjun
Year of Publication 25.05.2023
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Year of Publication 25.05.2023
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Methods for depositing dielectric material
Tannos, Jethro, Buchberger, Jr., Douglas A, Hua, Zhong Qiang, Nemani, Srinivas D, Citla, Bhargav S, Li, Jingyi, Yieh, Ellie Y
Year of Publication 18.04.2023
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Year of Publication 18.04.2023
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PROCESS CELL FOR FILED GUIDED POST EXPOSURE BAKE PROCESS
SUN, Jiayi, HANSON, Kyle M, LIANG, Qiwei, YIEH, Ellie Y, HUANG, Lancelot, MCHUGH, Paul R, TSO, Alan L, BUCHBERGER, Jr., Douglas A, KOZHIKKALKANDI, Rahul, LUBOMIRSKY, Dmitry, ALEX, Nithin Thomas
Year of Publication 16.05.2024
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Year of Publication 16.05.2024
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Apparatus and methods for verification and re-use of process fluids
Bangar, Mangesh Ashok, Pisharody, Gautam, Huang, Lancelot, Lubomirsky, Dmitry, Ngai, Christopher Siu Wing, Buchberger, Jr., Douglas A, Dai, Huixiong, Nemani, Srinivas D, Tso, Alan L
Year of Publication 21.03.2023
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Year of Publication 21.03.2023
Patent
Methods for depositing dielectric material
Tannos, Jethro, Buchberger, Jr., Douglas A, Hua, Zhong Qiang, Nemani, Srinivas D, Li, Jingyi, Yieh, Ellie Y, Citla, Bhargav
Year of Publication 07.09.2021
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Year of Publication 07.09.2021
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Electrostatic chuck having thermally isolated zones with minimal crosstalk
Makhratchev, Konstantin, Della Rosa, Jason, Buchberger, Jr., Douglas A, Noobakhsh, Hamid, Parkhe, Vijay D, Mays, Brad L
Year of Publication 10.08.2021
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Year of Publication 10.08.2021
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Substrate support with symmetrical feed structure
Lin, Xing, Sheyner, Anchel, Buchberger, Jr., Douglas A, Nguyen, Andrew, Zhou, Xiaoping
Year of Publication 08.09.2020
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Year of Publication 08.09.2020
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Symmetric plasma process chamber
Collins, Kenneth S, Buchberger, Jr., Douglas A, Chen, Zhigang, Nguyen, Andrew, Tavassoli, Hamid, Ramaswamy, Kartik, Carducci, James D, Balakrishna, Ajit, Rauf, Shahid
Year of Publication 26.04.2022
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Year of Publication 26.04.2022
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PROCESS CELL FOR FIELD GUIDED POST EXPOSURE BAKE PROCESS
SUN, Jiayi, BUCHBERGER, Jr. Douglas A, HANSON, Kyle M, LIANG, Qiwei, YIEH, Ellie Y, HUANG, Lance, MCHUGH, Paul R, TSO, Alan L, KOZHIKKALKANDI, Rahul, LUBOMIRSKY, Dmitry, ALEX, Nithin Thomas
Year of Publication 06.10.2022
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Year of Publication 06.10.2022
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Apparatus for controlling temperature uniformity of a substrate
Bera, Kallol, Kumar, Surajit, Buchberger, Jr., Douglas A, Nguyen, Andrew, Tavassoli, Hamid, Zhou, Xiaoping, Rauf, Shahid
Year of Publication 20.08.2019
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Year of Publication 20.08.2019
Patent
Apparatus for post-exposure baking of photoresist
LUBOMIRSKY DMITRY, DUKOVICH, JOHN, O, SRINIVASA D NEMANI, DOUGLAS A. BUCHBERGER JR
Year of Publication 20.10.2023
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Year of Publication 20.10.2023
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