Possibilities of single-wafer single-lithography processing for nanoelectronic and optoelectronic VMMOS ULSI
Bubennikov, A.N., Bubennikov, A.A., Rakitin, V.V., Zykov, A.V.
Published in ICM 2000. Proceedings of the 12th International Conference on Microelectronics. (IEEE Cat. No.00EX453) (2000)
Published in ICM 2000. Proceedings of the 12th International Conference on Microelectronics. (IEEE Cat. No.00EX453) (2000)
Get full text
Conference Proceeding
New technonomics trends and concepts of manufacturing for competitive deep-submicron ULSI and WSI
Bubennikov, A.N., Bubennikov, A.A., Rakitin, V.V.
Published in 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) (1997)
Published in 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) (1997)
Get full text
Conference Proceeding