CHEMICAL MECHANICAL POLISHING PAD COMPOSITE POLISHING LAYER FORMULATION
KOZHUKH JULIA, BRUGAROLAS BRUFAU TERESA, HENDRON JEFFREY JAMES, JACOB GEORGE C, TRAN TONY QUAN, LUGO DIEGO, STACK MARC R, MILLER JEFFREY B, QIAN BAINIAN
Year of Publication 04.01.2017
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Year of Publication 04.01.2017
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METHOD OF MAKING POLISHING LAYER FOR CHEMICAL MECHANICAL POLISHING PAD
BRUGAROLAS BRUFAU TERESA, KOZHUKH JULIA, TONG YUHUA, JACOB GEORGE C, DEGROOT MARTY W, LUGO DIEGO, VENEZIALE DAVID MICHAEL, WANK ANDREW, YEH FENGJI, MILLER JEFFREY B, QIAN BAINIAN
Year of Publication 04.01.2017
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Year of Publication 04.01.2017
Patent
CHEMICAL MECHANICAL POLISHING PAD AND METHOD OF MAKING SAME
KOZHUKH JULIA, TRAN TONY QUAN, WANK ANDREW, YEH FENGJI, MILLER JEFFREY B, QIAN BAINIAN, BRUGAROLAS BRUFAU TERESA, TONG YUHUA, JACOB GEORGE C, DEGROOT MARTY W, LUGO DIEGO, STACK MARC R, VENEZIALE DAVID MICHAEL
Year of Publication 04.01.2017
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Year of Publication 04.01.2017
Patent
METHOD OF MAKING COMPOSITE POLISHING LAYER FOR CHEMICAL MECHANICAL POLISHING PAD
BRUGAROLAS BRUFAU TERESA, KOZHUKH JULIA, HENDRON JEFFREY JAMES, TONG YUHUA, JACOB GEORGE C, TRAN TONY QUAN, LUGO DIEGO, STACK MARC R, VENEZIALE DAVID MICHAEL, WANK ANDREW, MILLER JEFFREY B, QIAN BAINIAN
Year of Publication 04.01.2017
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Year of Publication 04.01.2017
Patent