Sub-5 nm FIB direct patterning of nanodevices
Gierak, J., Madouri, A., Biance, A.L., Bourhis, E., Patriarche, G., Ulysse, C., Lucot, D., Lafosse, X., Auvray, L., Bruchhaus, L., Jede, R.
Published in Microelectronic engineering (01.05.2007)
Published in Microelectronic engineering (01.05.2007)
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Conference Proceeding
FIB carving of nanopores into suspended graphene films
Morin, A., Lucot, D., Ouerghi, A., Patriarche, G., Bourhis, E., Madouri, A., Ulysse, C., Pelta, J., Auvray, L., Jede, R., Bruchhaus, L., Gierak, J.
Published in Microelectronic engineering (01.09.2012)
Published in Microelectronic engineering (01.09.2012)
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Journal Article
High resolution and high density ion beam lithography employing HSQ resist
Bruchhaus, L., Bauerdick, S., Peto, L., Barth, U., Rudzinski, A., Mussmann, J., Klingfus, J., Gierak, J., Hövel, H.
Published in Microelectronic engineering (01.09.2012)
Published in Microelectronic engineering (01.09.2012)
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Journal Article
Exploration of the ultimate patterning potential achievable with focused ion beams
Gierak, J., Bourhis, E., Faini, G., Patriarche, G., Madouri, A., Jede, R., Bruchhaus, L., Bauerdick, S., Schiedt, B., Biance, A.L., Auvray, L.
Published in Ultramicroscopy (01.04.2009)
Published in Ultramicroscopy (01.04.2009)
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Journal Article
Exploration of the ultimate patterning potential achievable with high resolution focused ion beams
GIERAK, J, MAILLY, D, JAMET, J.-P, FERRE, J, MOUGIN, A, CHAPPERT, C, MATHET, V, WARIN, P, CHAPMAN, J, HAWKES, P, JEDE, R, BRUCHHAUS, L, BARDOTTI, L, PREVEL, B, MELINON, P, PEREZ, A, HYNDMAN, R
Published in Applied physics. A, Materials science & processing (2005)
Published in Applied physics. A, Materials science & processing (2005)
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Journal Article
Sub-5nm FIB direct patterning of nanodevices
Gierak, J., Madouri, A., Biance, A.L., Bourhis, E., Patriarche, G., Ulysse, C., Lucot, D., Lafosse, X., Auvray, L., Bruchhaus, L., Jede, R.
Published in Microelectronic engineering (01.05.2007)
Published in Microelectronic engineering (01.05.2007)
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Journal Article
Exploration of the ultimate patterning potential achievable with focused ion beams
Gierak, J., Bourhis, E., Mérat Combes, M.N., Chriqui, Y., Sagnes, I., Mailly, D., Hawkes, P., Jede, R., Bruchhaus, L., Bardotti, L., Prével, B., Hannour, A., Mélinon, P., Perez, A., Ferré, J., Jamet, J.-P., Mougin, A., Chappert, C., Mathet, V.
Published in Microelectronic engineering (01.03.2005)
Published in Microelectronic engineering (01.03.2005)
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Journal Article
Conference Proceeding
Challenges and Opportunities for Focused Ion Beam Processing at the Nano-scale
Gierak, J, Schiedt, B, Lucot, D, Madouri, A, Bourhis, E, Patriarche, G, Ulysse, C, Lafosse, X, Auvray, L, Bruchhaus, L, Jede, R
Published in Microscopy and microanalysis (01.07.2009)
Published in Microscopy and microanalysis (01.07.2009)
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Journal Article
FIB technology applied to the improvement of the crystal quality of GaN and to the fabrication of organised arrays of quantum dots
GIERAK, J, BOURHIS, E, JEDE, R, BRUCHHAUS, L, BEAUMONT, B, GIBART, P
Published in Microelectronic engineering (01.06.2004)
Published in Microelectronic engineering (01.06.2004)
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Conference Proceeding
Journal Article
Characterization of thermal device properties with nanometer resolution
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Journal Article
Conference Proceeding
Controlled fabrication of nanopit patterns on a graphite surface using focused ion beams and oxidation
Ghaleh, F., Köster, R., Hövel, H., Bruchhaus, L., Bauerdick, S., Thiel, J., Jede, R.
Published in Journal of applied physics (15.02.2007)
Published in Journal of applied physics (15.02.2007)
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Journal Article
Controlled fabrication of nanopit patterns on a graphite surfaceusing focused ion beams and oxidation
Ghaleh, F., Köster, R., Hövel, H., Bruchhaus, L., Bauerdick, S., Thiel, J., Jede, R.
Published in Journal of applied physics (16.02.2007)
Published in Journal of applied physics (16.02.2007)
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Journal Article
Challenges and Opportunities for Focused Ion Beam Processing at the Nano-Scale
Gierak, J., Schiedt, B., Lucot, D., Madouri, A., Bourhis, E., Patriarche, G., Ulysse, C., Lafosse, X., Auvray, L., Bruchhaus, L., Jede, R.
Published in Microscopy today (01.09.2009)
Published in Microscopy today (01.09.2009)
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Magazine Article
Nanoimprinting for optical device fabrication: some polymer issues
Torres, C.M.S., Hoffmann, T., Sidiki, T.P., Bruchhaus, L., Bruch, L.-U., Ahopelto, J., Schulz, H., Scheer, H.-C., Cardinaud, C., Pfeiffer, K.
Published in Conference on Lasers and Electro-Optics (CLEO 2000). Technical Digest. Postconference Edition. TOPS Vol.39 (IEEE Cat. No.00CH37088) (2000)
Published in Conference on Lasers and Electro-Optics (CLEO 2000). Technical Digest. Postconference Edition. TOPS Vol.39 (IEEE Cat. No.00CH37088) (2000)
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Conference Proceeding