STORAGE AND SUB-ATMOSPHERIC DELIVERY OF DOPANT COMPOSITIONS FOR CARBON ION IMPLANTATION
LU DRAGONNO, HEIDERMAN DOUGLAS C, SHIH ROBERT, CHIU WEN PIN, BROWN LLOYD A, CAMPEAU SERGE M, SINHA ASHWINI K, KAO CHIEN KANG
Year of Publication 26.03.2019
Get full text
Year of Publication 26.03.2019
Patent
PRESSURE INDICATING DEVICE
FANTI LISA A, GUNAY MURAT, BROWN LLOYD A, CAMPEAU SERGE M, SPOHN RONALD F
Year of Publication 27.06.2014
Get full text
Year of Publication 27.06.2014
Patent
METHODS FOR EXTENDING ION SOURCE LIFE AND IMPROVING ION SOURCE PERFORMANCE DURING CARBON IMPLANTATION
CAMPEAU SERGE, BASSOM NEIL J, BROWN LLOYD A, SINHA ASHWINI K, SPORLEDER DAVID
Year of Publication 30.12.2013
Get full text
Year of Publication 30.12.2013
Patent
STORAGE AND SUB-ATMOSPHERIC DELIVERY OF DOPANT COMPOSITIONS FOR CARBON ION IMPLANTATION
LU DRAGONNO, HEIDERMAN DOUGLAS C, SHIH ROBERT, CHIU WEN PIN, BROWN LLOYD A, CAMPEAU SERGE M, SINHA ASHWINI K, KAO CHIEN KANG
Year of Publication 25.08.2015
Get full text
Year of Publication 25.08.2015
Patent