애퍼처 및 방법
KHOURI THOMAS WILLIAM GEORG, VAN DORP BAS WILLEM JOHANNES JOHANNA ANNA, BROM PAUL PETER ANNA ANTONIUS, LINKOV ALEXANDER EVGENEVICH, TIMMERMANS ROGER ANTON MARIE
Year of Publication 23.07.2024
Get full text
Year of Publication 23.07.2024
Patent
잔해물 경감 시스템, 방사선 소스 및 리소그래피 장치
HULTERMANS RONALD JOHANNES, RIEPEN MICHEL, BROM PAUL PETER ANNA ANTONIUS
Year of Publication 01.04.2019
Get full text
Year of Publication 01.04.2019
Patent
방사선 소스에서 사용하기 위한 장치
RIEPEN MICHEL, GEERDINK GIELEN MARISE VERA, SCHOUT TWAN JACOBUS, BROM PAUL PETER ANNA ANTONIUS, DE RUITER RIELLE, MELISSOURGOS GEORGIOS
Year of Publication 10.06.2022
Get full text
Year of Publication 10.06.2022
Patent
탄성 안내 디바이스, 위치 설정 디바이스, 블레이드 및 리소그래피 장치
MULDER ERWIN ANDREAS BERNARDUS, BROM PAUL PETER ANNA ANTONIUS, BUSTRAAN KRIJN FREDERIK, KOOLSTRA RINZE, DE GROOT ANTONIUS FRANCISCUS JOHANNES
Year of Publication 05.08.2021
Get full text
Year of Publication 05.08.2021
Patent
CONTAMINATION PREVENTION SYSTEM, LITHOGRAPHIC APPARATUS, RADIATION SOURCE, AND METHOD FOR MANUFACTURING A DEVICE
WASSINK ARNOUD CORNELIS, BUIS EDWIN JOHAN, HOOGENDAM CHRISTIAAN ALEXANDER, BROM PAUL PETER ANNA ANTONIUS, STRUYCKEN ALEXANDER MATTHIJS, BIJLAART ERIK THEODORUS MARIA
Year of Publication 07.04.2010
Get full text
Year of Publication 07.04.2010
Patent
Debris mitigation system, radiation source and lithographic apparatus
Riepen, Michel, Hultermans, Ronald Johannes, Brom, Paul Peter Anna Antonius
Year of Publication 27.04.2021
Get full text
Year of Publication 27.04.2021
Patent
DEBRIS MITIGATION SYSTEM, RADIATION SOURCE AND LITHOGRAPHIC APPARATUS
BROM, Paul, Peter, Anna, Antonius, RIEPEN, Michel, HULTERMANS, Ronald, Johannes
Year of Publication 01.02.2018
Get full text
Year of Publication 01.02.2018
Patent
Lithographic Method and Apparatus
PAUL PETER ANNA ANTONIUS BROM, MICHEL RIEPEN, RONALD JOHANNES HULTERMANS
Year of Publication 31.01.2018
Get full text
Year of Publication 31.01.2018
Patent
Lithographic method and apparatus
RIEPEN, MICHEL, HULTERMANS, RONALD JOHANNES, BROM, PAUL PETER ANNA ANTONIUS
Year of Publication 21.08.2021
Get full text
Year of Publication 21.08.2021
Patent
DEBRIS MITIGATION SYSTEM, RADIATION SOURCE AND LITHOGRAPHIC APPARATUS
HULTERMANS RONALD JOHANNES, RIEPEN MICHEL, BROM PAUL PETER ANNA ANTONIUS
Year of Publication 15.03.2019
Get full text
Year of Publication 15.03.2019
Patent
Lithographic method and apparatus
RIEPEN, MICHEL, HULTERMANS, RONALD JOHANNES, BROM, PAUL PETER ANNA ANTONIUS
Year of Publication 01.04.2018
Get full text
Year of Publication 01.04.2018
Patent
Apparatus for use in a radiation source
GEERDINK-GIELEN, MARISE VERA, RIEPEN, MICHEL, MELISSOURGOS, GEORGIOS, SCHOUT TWAN, JACOBUS, BROM, PAUL PETER ANNA ANTONIUS, DE RUITER, RIELLE
Year of Publication 01.08.2021
Get full text
Year of Publication 01.08.2021
Patent
RADIATION SYSTEM AND LITHOGRAPHIC APPARATUS
SOER WOUTER ANTHON, IVANOV VLADIMIR VITALEVICH, BANINE VADIM YEVGENYEVICH, KOSHELEV KONSTANTIN, WASSINK ARNOLD CORNELIS, GLUSHKOV DENIS ALEXANDROVICH, CLIVITZN VLADIMIR MIKHAILOVICH, DERK JAN WILFRED KLUNDER, PAUL PETER ANNA ANTONIUS BROM, CADEE THEODORUS PETRUS MARIA, WILHELMUS VAN HERPEN MAARTEN MARINUS JOHANNES
Year of Publication 07.06.2012
Get full text
Year of Publication 07.06.2012
Patent
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby
BAKKER LEVINUS PIETER, BANINE VADIM YEVGENYEVICH, WASSINK ARNOUD CORNELIS, SPEE CAROLUS IDA MARIA ANTONIUS, FRANKEN JOHANNES CHRISTIAAN LEONARDUS, MOORS JOHANNES HUBERTUS JOSEPHINA, BROM PAUL PETER ANNA ANTONIUS
Year of Publication 11.01.2011
Get full text
Year of Publication 11.01.2011
Patent
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby
Bakker, Levinus Pieter, Banine, Vadim Yevgenyevich, Moors, Johannes Hubertus Josephina, Spee, Carolus Ida Maria Antonius, Franken, Johannes Christiaan Leonardus, Wassink, Arnoud Cornelis, Brom, Paul Peter Anna Antonius
Year of Publication 11.01.2011
Get full text
Year of Publication 11.01.2011
Patent
Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device
WASSINK ARNOUD CORNELIS, BUIS EDWIN JOHAN, HOOGENDAM CHRISTIAAN ALEXANDER, BROM PAUL PETER ANNA ANTONIUS, BIJLAART ERIK THEODORUS MARIA, STRUYCKEN ALEXANDER MATTHIJS
Year of Publication 13.10.2009
Get full text
Year of Publication 13.10.2009
Patent
Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device
Buis, Edwin Johan, Bijlaart, Erik Theodorus Maria, Hoogendam, Christiaan Alexander, Struycken, Alexander Matthijs, Wassink, Arnoud Cornelis, Brom, Paul Peter Anna Antonius
Year of Publication 13.10.2009
Get full text
Year of Publication 13.10.2009
Patent