Wafer surface protection in a gas deposition process
BENZING; JEFFREY C, BROADBENT; ELIOT K, BURKHART; CHRISTOPHER W, CHIN; BARRY L, VAN DE VEN; EVERHARDUS P
Year of Publication 26.11.1996
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Year of Publication 26.11.1996
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Apparatus for and method of protection during substrate processing
BENZING, JEFFREY C, BURKHART, CHRISTOPHER W, VAN DEN VEN, EVERHARDUS P, BROADBENT, ELIOT K, CHIN, BARRY L
Year of Publication 13.03.1996
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Year of Publication 13.03.1996
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Apparatus for preventing deposition on frontside peripheral region and edge of wafer in chemical vapor deposition apparatus
BENZING; JEFFREY C, BROADBENT; ELIOT K, BURKHART; CHRISTOPHER W, CHIN; BARRY L, LANE; LAWRENCE C, VAN DE VEN; EVERHARDUS P, MCINERNEY; EDWARD JOHN
Year of Publication 16.03.1999
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Year of Publication 16.03.1999
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Gas-based backside protection during substrate processing
BENZING; JEFFREY C, BROADBENT; ELIOT K, BURKHART; CHRISTOPHER W, CHIN; BARRY L, VAN DE VEN; EVERHARDUS P
Year of Publication 20.12.1994
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Year of Publication 20.12.1994
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Chemical vapor deposition apparatus and method for exclusion of deposition and contamination from the backside and periphery of the wafers
BENZING, JEFFREY C, BURKHART, CHRISTOPHER W, VAN DE VEN, EVERHARDUS P, LANE, LAWRENCE C, BROADBENT, ELIOT K, CHIN, BARRY L
Year of Publication 29.10.1997
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Year of Publication 29.10.1997
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GAS-BASED SUBSTRATE PROTECTION DURING PROCESSING
BENZING; JEFFREY C, BROADBENT; ELIOT K, BURKHART; CHRISTOPHER W, CHIN; BARRY L, VAN DE VEN; EVERHARDUS P
Year of Publication 24.08.1993
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Year of Publication 24.08.1993
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Gas-based backside protection during substrate processing
BENZING; JEFFREY C, BROADBENT; ELIOT K, BURKHART; CHRISTOPHER W, CHIN; BARRY L, VAN DE VEN; EVERHARDUS P
Year of Publication 27.07.1993
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Year of Publication 27.07.1993
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APPARATUS FOR AND METHOD OF PROTECTION DURING SUBSTRATE PROCESSING
BENZING, JEFFREY C, BURKHART, CHRISTOPHER W, VAN DEN VEN, EVERHARDUS P, BROADBENT, ELIOT K, CHIN, BARRY L
Year of Publication 13.05.1992
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Year of Publication 13.05.1992
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Apparatus for and method of protection during substrate processing
BENZING, JEFFREY C, BURKHART, CHRISTOPHER W, VAN DEN VEN, EVERHARDUS P, BROADBENT, ELIOT K, CHIN, BARRY L
Year of Publication 22.01.1992
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Year of Publication 22.01.1992
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Chemical vapor deposition apparatus and method for exclusion of deposition and contamination from the backside and periphery of the wafers
BENZING, JEFFREY C, BURKHART, CHRISTOPHER W, VAN DE VEN, EVERHARDUS P, LANE, LAWRENCE C, BROADBENT, ELIOT K, CHIN, BARRY L
Year of Publication 28.02.1996
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Year of Publication 28.02.1996
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Gas-based substrate deposition protection
BENZING, JEFFREY C, MCINERNEY, VAN DE VEN, EVERHARDUS P, BURKHARD, CHRISTOPHER W, LANE, LAWRENCE C, BROADBENT, ELIOT K, CHIN, BARRY L
Year of Publication 28.02.1996
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Year of Publication 28.02.1996
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Vorrichtung und Verfahren zum Substratschutz während Substratbearbeitung
CHIN, BARRY L., SUNNYVALE, CA 94087, US, BROADBENT, ELIOT K., SAN JOSE, CA 95148, US, BURKHART, CHRISTOPHER W., SAN JOSE, CA 95124, US, VAN DEN VEN, EVERHARDUS P., CUPERTINO, CA 95014, US, BENZING, JEFFREY C., SAN JOSE, CA 95129, US
Year of Publication 08.08.1996
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Year of Publication 08.08.1996
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VORRICHTUNG UND VERFAHREN ZUM SUBSTRATSCHUTZ WAEHREND SUBSTRATBEARBEITUNG
CHIN, BARRY L., SUNNYVALE, CALIFORNIA 94087, US, VAN DEN VEN, EVERHARDUS P., CUPERTINO, CALIFORNIA 95014, US, BROADBENT, ELIOT K., SAN JOSE, CALIFORNIA 95148, US, BENZING, JEFFREY C., SAN JOSE, CALIFORNIA 95129, US, BURKHART, CHRISTOPHER W., SAN JOSE, CALIFORNIA 95124, US
Year of Publication 23.07.1992
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Year of Publication 23.07.1992
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Magnetron-Zerstäubungsvorrichtung
MILLER, KENNETH C., MOUNTAIN VIEW, CALIFORNIA 94043, US, BROADBENT, ELIOT K., SAN JOSE, CALIFORNIA 95148, US
Year of Publication 24.10.1996
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Year of Publication 24.10.1996
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MAGNETRON-ZERSTAEUBUNGSVORRICHTUNG
MILLER, KENNETH C., MOUNTAIN VIEW, CALIFORNIA 94043, US, BROADBENT, ELIOT K., SAN JOSE, CALIFORNIA 95148, US
Year of Publication 18.03.1993
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Year of Publication 18.03.1993
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