Application of self-aligned CoSi/sub 2/ interconnection in submicrometer CMOS transistors
Broadbent, E.K., Irani, R.F., Morgan, A.E., Maillot, P.
Published in IEEE transactions on electron devices (01.11.1989)
Published in IEEE transactions on electron devices (01.11.1989)
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Journal Article
Interfacial structure of tungsten layers formed by selective low pressure chemical vapor deposition
STACY, W. T, BROADBENT, E. K, NORCOTT, M. H
Published in Journal of the Electrochemical Society (01.02.1985)
Published in Journal of the Electrochemical Society (01.02.1985)
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Journal Article
Self-aligned silicided (PtSi and CoSi2) ultra-shallow p+/n junctions
Broadbent, E.K., Delfino, M., Morgan, A.E., Sadana, D.K., Maillot, P.
Published in IEEE electron device letters (01.07.1987)
Published in IEEE electron device letters (01.07.1987)
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Journal Article
Characterization of titanium silicide films formed by composite sputtering and rapid thermal annealing
Broadbent, E.K., Morgan, A.E., Coulman, B., Huang, I.-W., Kuiper, A.E.T.
Published in Thin solid films (20.07.1987)
Published in Thin solid films (20.07.1987)
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Journal Article
Excimer laser processing of Al-1%Cu/TiW interconnect layers
Broadbent, E.K., Ritz, K.N., Maillot, P., Ong, E.
Published in Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference (1989)
Published in Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference (1989)
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Conference Proceeding
The Microstructure of Ball Bond Corrosion Failures
Ritz, K.N., Stacy, W.T., Broadbent, E.K.
Published in 25th International Reliability Physics Symposium (01.04.1987)
Published in 25th International Reliability Physics Symposium (01.04.1987)
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Conference Proceeding