Device and Method for Stopping an Etching Process
DICKENSCHEID WOLFGANG, MEINHOLD DIRK, HARTENBERGER MICHAEL, SEIDEMANN GEORG, BRENCHER LOTHAR
Year of Publication 07.07.2016
Get full text
Year of Publication 07.07.2016
Patent
Device and method for stopping etching process
DICKENSCHEID WOLFGANG, MEINHOLD DIRK, HARTENBERGER MICHAEL, SEIDEMANN GEORG, BRENCHER LOTHAR
Year of Publication 05.04.2016
Get full text
Year of Publication 05.04.2016
Patent
Device and Method for Stopping Etching Process
DICKENSCHEID WOLFGANG, MEINHOLD DIRK, HARTENBERGER MICHAEL, SEIDEMANN GEORG, BRENCHER LOTHAR
Year of Publication 31.10.2013
Get full text
Year of Publication 31.10.2013
Patent
Device and method for stopping an etching process
MEINHOLD DIRK, HARTENBERGER MICHAEL, DICKENSCHELD WOLFGANG, SEIDEMANN GEORG, BRENCHER LOTHAR
Year of Publication 26.03.2013
Get full text
Year of Publication 26.03.2013
Patent
Semiconductor unit e.g. dynamic RAM memory chip, manufacture, involves partially arranging hard mask for protecting border area of substrate, before etching border area that lies beneath mask
SHI, FENG, BRENCHER, LOTHAR, RUDOLPH, UWE, MARKERT, MATTHIAS, LORENZ, BARBARA
Year of Publication 05.01.2006
Get full text
Year of Publication 05.01.2006
Patent