Fabrication of free-standing porous silicon microstructures
Garel, O, Breluzeau, C, Dufour-Gergam, E, Bosseboeuf, A, Belier, B, Mathet, V, Verjus, F
Published in Journal of micromechanics and microengineering (01.07.2007)
Published in Journal of micromechanics and microengineering (01.07.2007)
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Conference Proceeding
Vacuum measurement in wafer level encapsulations by interference microscopy
BOSSEBOEUF, A, GRANDCHAMP, J. P, BRELUZEAU, C, LANI, S, PALOMO, J, BOUVILLE, D
Published in Microsystem technologies (01.09.2006)
Published in Microsystem technologies (01.09.2006)
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Conference Proceeding
Journal Article
Full wave and asymptotic computation of coupling loss between antennas on aircraft
Legendre, Jean-Francois, Bréluzeau, C.
Published in Microwave and optical technology letters (01.12.2012)
Published in Microwave and optical technology letters (01.12.2012)
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Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor
Le Foulgoc, Baptiste, Bourouina, Tarik, Le Traon, Olivier, Bosseboeuf, Alain, Marty, Frédéric, Breluzeau, Cédric, Grandchamp, Jean-Paul, Masson, Stève
Published in Journal of micromechanics and microengineering (01.06.2006)
Published in Journal of micromechanics and microengineering (01.06.2006)
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Conference Proceeding