Investigation of the low-pressure plasma-chemical conversion of fluorocarbon waste gases
Breitbarth, F. W., Berg, D., Dumke, K., Tiller, H. -J.
Published in Plasma chemistry and plasma processing (01.03.1997)
Published in Plasma chemistry and plasma processing (01.03.1997)
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Journal Article
On mass- and emission spectroscopic CVD process monitoring of organometallics/O2 discharges
BREITBARTH, F.-W, BALD, J, RODEMEYER, S, SUHR, H
Published in Plasma chemistry and plasma processing (01.06.1993)
Published in Plasma chemistry and plasma processing (01.06.1993)
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Journal Article
EPR investigation of plasma-chemical resist etching in O2 and O2/CF4 discharges
BREITBARTH, F.-W, DUCKE, E, TILLER, H.-J
Published in Plasma chemistry and plasma processing (01.09.1990)
Published in Plasma chemistry and plasma processing (01.09.1990)
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Journal Article
Plasma-chemical reactions in weakly decomposed CCl4
BREITBARTH, F.-W, TILLER, H.-J, REINHARDT, R
Published in Plasma chemistry and plasma processing (01.12.1985)
Published in Plasma chemistry and plasma processing (01.12.1985)
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Journal Article